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Substrate-like particle sensor

  • US 8,823,933 B2
  • Filed: 09/27/2007
  • Issued: 09/02/2014
  • Est. Priority Date: 09/29/2006
  • Status: Active Grant
First Claim
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1. A substrate-like particle sensor assembly for sensing particles within a sealed processing chamber of substrates, the substrate-like particle sensor assembly comprising:

  • a substrate-like base portion having a form factor that is similar to the substrates;

    an electronics enclosure disposed on the substrate-like base portion, the electronics enclosure enclosing electronics;

    a power source disposed within the electronics enclosure;

    a controller disposed within the electronics enclosure and operably coupled to the power source; and

    a particle sensor integrally attached to the electronics enclosure and operably coupled to the controller, the particle sensor having a light source disposed near a central region of the particle sensor and a plurality of illumination detectors disposed near a periphery of the particle sensor, the particle sensor also having a plurality of mirrors disposed near the periphery of the particle sensor and arranged to bend a light beam across a surface of the particle sensor.

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