Substrate-like particle sensor
First Claim
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1. A substrate-like particle sensor assembly for sensing particles within a sealed processing chamber of substrates, the substrate-like particle sensor assembly comprising:
- a substrate-like base portion having a form factor that is similar to the substrates;
an electronics enclosure disposed on the substrate-like base portion, the electronics enclosure enclosing electronics;
a power source disposed within the electronics enclosure;
a controller disposed within the electronics enclosure and operably coupled to the power source; and
a particle sensor integrally attached to the electronics enclosure and operably coupled to the controller, the particle sensor having a light source disposed near a central region of the particle sensor and a plurality of illumination detectors disposed near a periphery of the particle sensor, the particle sensor also having a plurality of mirrors disposed near the periphery of the particle sensor and arranged to bend a light beam across a surface of the particle sensor.
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Abstract
A substrate-like particle sensor includes a substrate-like base portion and an electronics enclosure disposed on the substrate-like base portion. A power source is located within the electronics enclosure. A controller is operably coupled to the power source. A particle sensor is operably coupled to the controller and provides an indication to the controller of at least one particle present near the particle sensor.
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Citations
10 Claims
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1. A substrate-like particle sensor assembly for sensing particles within a sealed processing chamber of substrates, the substrate-like particle sensor assembly comprising:
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a substrate-like base portion having a form factor that is similar to the substrates; an electronics enclosure disposed on the substrate-like base portion, the electronics enclosure enclosing electronics; a power source disposed within the electronics enclosure; a controller disposed within the electronics enclosure and operably coupled to the power source; and a particle sensor integrally attached to the electronics enclosure and operably coupled to the controller, the particle sensor having a light source disposed near a central region of the particle sensor and a plurality of illumination detectors disposed near a periphery of the particle sensor, the particle sensor also having a plurality of mirrors disposed near the periphery of the particle sensor and arranged to bend a light beam across a surface of the particle sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification