Piezoelectric microphone fabricated on glass

• US 8,824,706 B2
• Filed: 08/30/2011
• Issued: 09/02/2014
• Est. Priority Date: 08/30/2011
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Stephanou, Philip Jason, Burns, David William
• Primary Examiner(s): Le, Huyen D
• Application Number:
  US13/221,676
• Publication Number:
  US 20130051586A1
• Time in Patent Office: 1,099 Days
• Field of Search: 381/355, 381/356, 381/369, 381/173, 381/174, 381/175, 381/190, 381/191, 295/94, 29/254.1, 29/254.2, 257/416, 257/417, 257/684, 438/53
• US Class Current: 381/174
• CPC Class Codes: C03C 17/3639 Multilayers containing at least two functional metal layers
• CPC Class Codes: C03C 27/08 with the aid of intervening metal
• CPC Class Codes: C03C 27/10 with the aid of adhesive specially adapted for that purpose
• CPC Class Codes: H04R 1/04 Structural association of microphone with electric circuitry therefor in deaf-aid sets H04R25/00
• CPC Class Codes: H04R 1/06 Arranging circuit leads; Relieving strain on circuit leads
• CPC Class Codes: H04R 1/086 Protective screens, e.g. all weather or wind screens
• CPC Class Codes: H04R 17/025 using a piezoelectric polymer
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 2499/11 Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
• CPC Class Codes: H04R 2499/15 Transducers incorporated in visual displaying devices, e.g. televisions, computer displays, laptops

Abstract

This disclosure provides systems, methods and apparatus for glass-encapsulated microphones. In one aspect, a glass-encapsulated microphone may include a glass substrate, an electromechanical microphone device, an integrated circuit device, and a cover glass. The cover glass may be bonded to the glass substrate with an adhesive, such as epoxy, or a metal bond ring. The cover glass may have any of a number of configurations. In some configurations, the cover glass may define an aperture for the electromechanical microphone device at an edge of the glass-encapsulated microphone. In some configurations, the cover glass may define a cavity to accommodate the integrated circuit device that is separate from a cavity that accommodates the electromechanical microphone device.

Claims

1. An apparatus for detecting sound comprising:

a glass substrate;

an electromechanical microphone device disposed on a surface of the glass substrate;

an integrated circuit device disposed on the surface of the glass substrate, the integrated circuit device configured to sense output from the electromechanical microphone device;

a cover glass bonded to the surface of the glass substrate, wherein the cover glass includes a first recess that defines a first cavity when the cover glass is bonded to the surface of the glass substrate, the first cavity being configured to accommodate the electromechanical microphone device, a portion of the first recess being at an edge of the cover glass such that the cover glass and the glass substrate, when bonded together, define an aperture at the edge of the cover glass, the aperture configured to allow a sound wave to interact with the electromechanical microphone device;

a layer of metal between the glass substrate and the electromechanical microphone device; and

a layer of metal on portions of the first cavity proximate the electromechanical microphone device.

2. The apparatus of claim 1, wherein the cover glass is bonded to the surface of the glass substrate with a joining ring, wherein the joining ring includes a metal bond ring.

3. The apparatus of claim 1, wherein the cover glass is bonded to the surface of the glass substrate with a joining ring, wherein the joining ring includes an epoxy.

4. The apparatus of claim 1, wherein the first cavity is further configured to accommodate the integrated circuit device.

5. The apparatus of claim 1, wherein the cover glass further includes a second recess that defines a second cavity when the cover glass is bonded to the surface of the glass substrate, the second cavity being configured to accommodate the integrated circuit device.

6. The apparatus of claim 5, wherein the second cavity is physically isolated from the first cavity.

7. The apparatus of claim 5, wherein when the cover glass is bonded to the surface of the glass substrate, the second cavity is hermetically sealed.

8. The apparatus of claim 1, wherein the cover glass includes a cutout, the cutout configured to allow the sound wave to interact with the electromechanical microphone device, wherein the cutout exposes a portion of the electromechanical microphone device approximately perpendicular to a portion of the electromechanical microphone device exposed by the aperture.

9. The apparatus of claim 1, wherein the electromechanical microphone device includes at least one of a piezoelectric sense element, a capacitive sense element, and a hybrid piezoelectric and capacitive sense element.

10. The apparatus of claim 1, wherein the electromechanical microphone device includes a plurality of sense elements.

11. The apparatus of claim 1, wherein the layers of metal are configured as an electrostatic shield.

12. The apparatus of claim 1, wherein a thickness of the glass substrate is about 100 to 700 micrometers, and wherein a thickness of the cover glass is about 100 to 700 micrometers.

13. The apparatus of claim 1, wherein the aperture has a height of about 100 to 300 micrometers.

14. The apparatus of claim 1, wherein the aperture has a width of about 20 to 1000 micrometers.

15. The apparatus of claim 1, wherein a length of the glass substrate is about 1 to 5 millimeters, wherein a width of the glass substrate is about 1 to 5 millimeters, wherein a length of the cover glass is about 1 to 5 millimeters, and wherein a width of the cover glass is about 1 to 5 millimeters.

16. The apparatus of claim 1, wherein a plurality of portions of the first recess are at an edge of the cover glass such that the cover glass and the glass substrate define multiple apertures when the cover glass is bonded to the surface of the glass substrate, the apertures configured to allow the sound wave to interact with the electromechanical microphone device.

17. The apparatus of claim 1, wherein the surface of the glass substrate further includes a plurality of conductive traces and a plurality of ledge pads, wherein the plurality of conductive traces are in electrical contact with the integrated circuit device, wherein each of the plurality of ledge pads is in electrical contact with a conductive trace of the plurality of conductive traces, and wherein the plurality of ledge pads are on an outside surface of the apparatus when the cover glass is bonded to the surface of the glass substrate.

18. The apparatus of claim 17, further comprising:

a flex tape, the flex tape including;

a plurality of flex pads at a first end of the flex tape,

a plurality of contacts at a second end of the flex tape, and

a plurality of electrical connections connecting each of the plurality of flex pads with a contact of the plurality of contacts,

wherein each of the plurality of flex pads is in electrical contact with a ledge pad of the plurality of ledge pads.

19. The apparatus of claim 1, further comprising:

a display;

a processor that is configured to communicate with the display, the processor being configured to process image data; and

a memory device that is configured to communicate with the processor.

20. The apparatus of claim 19, further comprising:

a driver circuit configured to send at least one signal to the display; and

a controller configured to send at least a portion of the image data to the driver circuit.

21. The apparatus of claim 19, further comprising:

an image source module configured to send the image data to the processor.

22. The apparatus of claim 21, wherein the image source module includes at least one of a receiver, transceiver, and transmitter.

23. The apparatus of claim 19, further comprising:

an input device configured to receive input data and to communicate the input data to the processor.

24. An apparatus comprising:

a glass substrate;

an electromechanical microphone device disposed on a surface of the glass substrate;

an integrated circuit device disposed on the surface of the glass substrate, the integrated circuit device configured to sense output from the electromechanical microphone device; and

a cover glass bonded to the surface of the glass substrate with a joining ring, wherein the cover glass includes a first recess that defines a first cavity when the cover glass is bonded to the surface of the glass substrate and a second recess that defines a second cavity when the cover glass is bonded to the surface of the glass substrate, the first cavity being configured to accommodate the electromechanical microphone device, the second cavity being configured to accommodate the integrated circuit device, a portion of the first recess being at an edge of the cover glass such that when the cover glass is bonded to the surface of the glass substrate, the cover glass and the glass substrate define an aperture at the edge of the cover glass, the aperture configured to allow a sound wave to interact with the electromechanical microphone device.

25. The apparatus of claim 24, wherein the second cavity is physically isolated from the first cavity.

26. The apparatus of claim 25, wherein when the cover glass is bonded to the surface of the glass substrate, the second cavity is hermetically sealed.

27. The apparatus of claim 24, wherein the electromechanical microphone device includes at least one of a piezoelectric sense element, a capacitive sense element, and a hybrid piezoelectric and capacitive sense element.

28. A method of forming an acoustic microphone comprising:

providing a glass substrate, the glass substrate having an electromechanical microphone device disposed on a surface of the glass substrate;

bonding a cover glass to the surface of the glass substrate, wherein the cover glass includes a first recess that defines a first cavity when the cover glass is bonded to the surface of the glass substrate, the first cavity being configured to accommodate the electromechanical microphone device, a portion of the first recess being at an edge of the cover glass such that when the cover glass is bonded to the surface of the glass substrate, an aperture is defined, the aperture configured to allow a sound wave to interact with the electromechanical microphone device;

forming a layer of metal between the glass substrate and the electromechanical microphone device; and

forming a layer of metal on portions of the first cavity proximate the electromechanical microphone device.

29. The method of claim 28, the glass substrate further having an integrated circuit device disposed on the surface of the glass substrate, the integrated circuit device configured to sense output from the electromechanical microphone device.

30. The method of claim 28, wherein the bonding is performed with a metal bond ring.

31. The method of claim 28, wherein the bonding is performed with an epoxy.

32. An apparatus for detecting sound comprising:

a glass substrate;

an electromechanical microphone device disposed on a surface of the glass substrate;

an integrated circuit device disposed on the surface of the glass substrate, the integrated circuit device configured to sense output from the electromechanical microphone device; and

a cover glass bonded to the surface of the glass substrate, wherein the cover glass includes a first recess that defines a first cavity when the cover glass is bonded to the surface of the glass substrate, the first cavity being configured to accommodate the electromechanical microphone device, a portion of the first recess being at an edge of the cover glass such that the cover glass and the glass substrate, when bonded together, define an aperture at the edge of the cover glass, the aperture configured to allow a sound wave to interact with the electromechanical microphone device, wherein;

the surface of the glass substrate further includes a plurality of conductive traces and a plurality of ledge pads;

the plurality of conductive traces are in electrical contact with the integrated circuit device;

each of the plurality of ledge pads is in electrical contact with a conductive trace of the plurality of conductive traces; and

the plurality of ledge pads are on an outside surface of the apparatus when the cover glass is bonded to the surface of the glass substrate.

33. The apparatus of claim 32, further comprising:

a flex tape, the flex tape including;

a plurality of flex pads at a first end of the flex tape,

a plurality of contacts at a second end of the flex tape, and

a plurality of electrical connections connecting each of the plurality of flex pads with a contact of the plurality of contacts,

wherein each of the plurality of flex pads is in electrical contact with a ledge pad of the plurality of ledge pads.