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Piezoelectric microphone fabricated on glass

  • US 8,824,706 B2
  • Filed: 08/30/2011
  • Issued: 09/02/2014
  • Est. Priority Date: 08/30/2011
  • Status: Expired due to Fees
First Claim
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1. An apparatus for detecting sound comprising:

  • a glass substrate;

    an electromechanical microphone device disposed on a surface of the glass substrate;

    an integrated circuit device disposed on the surface of the glass substrate, the integrated circuit device configured to sense output from the electromechanical microphone device;

    a cover glass bonded to the surface of the glass substrate, wherein the cover glass includes a first recess that defines a first cavity when the cover glass is bonded to the surface of the glass substrate, the first cavity being configured to accommodate the electromechanical microphone device, a portion of the first recess being at an edge of the cover glass such that the cover glass and the glass substrate, when bonded together, define an aperture at the edge of the cover glass, the aperture configured to allow a sound wave to interact with the electromechanical microphone device;

    a layer of metal between the glass substrate and the electromechanical microphone device; and

    a layer of metal on portions of the first cavity proximate the electromechanical microphone device.

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