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Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter

  • US 8,827,548 B2
  • Filed: 05/18/2011
  • Issued: 09/09/2014
  • Est. Priority Date: 07/28/2006
  • Status: Active Grant
First Claim
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1. A microfluidic embedded vacuum insulated biocalorimeter comprising:

  • a calorimeter chamber comprising a parylene membrane, wherein both sides of the calorimeter chamber are under vacuum during measurement of a sample;

    a microfluidic channel used to deliver a sample to the calorimeter chamber, wherein the microfluidic channel is built from the parylene membrane; and

    a thermopile, used as a thermometer, located between two layers of the parylene membrane and protected from the sample.

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