Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter

• US 8,827,548 B2
• Filed: 05/18/2011
• Issued: 09/09/2014
• Est. Priority Date: 07/28/2006
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Roukes, Michael L., Fon, Chung-Wah, Lee, Wonhee, Tang, Hongxing, Axelrod, Blake Waters, Tan, John Liang
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): ROY, PUNAM P
• Application Number:
  US13/110,684
• Publication Number:
  US 20110216804A1
• Time in Patent Office: 1,210 Days
• Field of Search: 435/287.1, 977/724, 977/956, 977/958, 600/531, 422/51, 374/31, 374/33
• US Class Current: 374/31
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01L 1/044 of leaf springs
• CPC Class Codes: G01N 33/5026 on cell morphology
• CPC Class Codes: G01N 33/5029 on cell motility
• CPC Class Codes: G01N 33/5032 on intercellular interactions
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: Y10S 977/724 Devices having flexible or movable element
• CPC Class Codes: Y10S 977/956 Of mechanical property
• CPC Class Codes: Y10S 977/958 Of biomolecule property

Abstract

A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Claims

1. A microfluidic embedded vacuum insulated biocalorimeter comprising:

a calorimeter chamber comprising a parylene membrane, wherein both sides of the calorimeter chamber are under vacuum during measurement of a sample;

a microfluidic channel used to deliver a sample to the calorimeter chamber, wherein the microfluidic channel is built from the parylene membrane; and

a thermopile, used as a thermometer, located between two layers of the parylene membrane and protected from the sample.

2. The biocalorimeter of claim 1 wherein a PDMS (polydimethylsiloxane) peristaltic pump is used to move the sample in liquid along the microfluidic channel.

3. The biocalorimeter of claim 1, wherein the calorimeter chamber comprises:

a first region adjacent the parylene member defined by SU-8 on a first side and glass on a second side; and

a second region adjacent the parylene member formed by potassium hydroxide (KOH) etching for a SiN (Silicon nitride) membrane that is sealed.

4. The biocalorimeter of claim 1, wherein multiple layers of vacuum provide insulation of the sample.

5. The biocalorimeter of claim 1, wherein the thermopile comprises an AuNi alloy (Gold Nickel).

6. A method for measuring an enthalpy change of a sample in a microfluidic embedded vacuum insulated biocalorimeter, comprising:

creating a calorimeter chamber comprising a parylene membrane, wherein both sides of the calorimeter chamber are under vacuum during measurement of the sample;

creating a microfluidic channel used to deliver a sample to the calorimeter chamber, wherein the microfluidic channel is built from the parylene membrane; and

encapsulating a thermopile, used as a thermometer, between two layers of the parylene membrane and protected from the sample; and

measuring the enthalpy change of the sample in the calorimeter chamber.

7. The method of claim 6 further comprising moving the sample in liquid along the microfluidic channel utilizing a PDMS (polydimethylsiloxane) peristaltic pump.

8. The method of claim 6, wherein the calorimeter chamber is created by:

defining a first region adjacent the parylene member by SU-8 on a first side and glass on a second side; and

forming a second region adjacent the parylene member by potassium hydroxide (KOH) etching for a SiN (Silicon nitride) membrane that is sealed.

9. The method of claim 6, further comprising insulating the sample using multiple layers of vacuum.

10. The method of claim 6, wherein the thermopile comprises an AuNi alloy (Gold Nickel).