Apparatus and method of improving beam shaping and beam homogenization

• US 8,829,392 B2
• Filed: 02/21/2012
• Issued: 09/09/2014
• Est. Priority Date: 07/31/2007
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Adams, Bruce E., Howells, Samuel C., Jennings, Dean, Li, Jiping, Thomas, Timothy N., Moffatt, Stephen
• Primary Examiner(s): PAIK, SANG YEOP
• Application Number:
  US13/401,553
• Publication Number:
  US 20120148701A1
• Time in Patent Office: 931 Days
• Field of Search: 2191216-12184
• US Class Current: 219/121.75
• CPC Class Codes: B23K 2103/56 semiconducting
• CPC Class Codes: B23K 26/0613 having a common axis B23K26/0619 takes precedence
• CPC Class Codes: B23K 26/0622 by shaping pulses
• CPC Class Codes: B23K 26/067 Dividing the beam into multiple beams, e.g. multifocusing
• CPC Class Codes: B23K 26/073 Shaping the laser spot
• CPC Class Codes: B23K 26/0732 into a rectangular shape
• CPC Class Codes: G02B 27/0961 Lens arrays lens arrays per se G02B3/0006

Abstract

The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify.

Claims

1. An apparatus for thermally processing a substrate, comprising:

an energy source assembly that has an output that is adapted to deliver a first energy pulse;

a pulse stretching device that comprises;

a first beam splitting device that is adapted to split the first energy pulse delivered from the energy source assembly into a first sub-pulse and a second sub-pulse, wherein the first sub-pulse is transferred along a first path having a first length to a beam combining device; and

a first plurality of mirrors that are aligned to reflect the second sub-pulse received from the first beam splitting device along a second path having a second length to the beam combining device;

a first micro-lens array having a plurality of micro-lenses that are adapted to receive at least a portion of the first energy pulse;

a second micro-lens array having a plurality of micro-lenses that are adapted to receive at least a portion of the energy transmitted from the first micro-lens array;

a first lens that is positioned to receive the at least a portion of the energy transmitted from the micro lenses in the second micro-lens array and transmit the energy received from the second micro-lens array to one or more components that are used to direct the energy received to a surface of the substrate;

a second lens that is positioned to receive at least a portion of the first energy pulse and cause one or more images received by the micro-lenses in the first micro-lens array to vary for two or more micro-lenses between a center and an edge of the first micro-lens array; and

a random diffuser that is positioned to receive at least a portion of the first energy pulse and transmit the at least a portion of the first energy pulse to the first micro-lens array.

2. The apparatus of claim 1, wherein the first beam splitting device is insensitive to a polarization of an energy delivered in the first energy pulse and the beam combining device is adapted to orient the polarization of the first sub-pulse or the second sub-pulse to provide a composite pulse that is a sum of the first sub-pulse and the second sub-pulse.

3. The apparatus of claim 2, wherein the random diffuser is positioned to receive the at least a portion of the first energy pulse from the second lens.

4. The apparatus of claim 1, wherein the beam combining device is adapted to transmit the first sub-pulse and second sub-pulse to the random diffuser.

5. The apparatus of claim 1, wherein the first length is shorter than the second length.

6. The apparatus of claim 1, wherein the pulse stretching device further comprises:

a second beam splitting device that is adapted to receive and split the first sub-pulse into a third sub-pulse and a fourth sub-pulse, and receive and split the second sub-pulse into a fifth sub-pulse and a sixth sub-pulse, wherein the third and fifth sub-pulses are transferred along a portion of the first path to the beam combining device;

a second plurality of mirrors that are aligned to reflect the fourth sub-pulse and the sixth sub-pulse received from the second beam splitting device along a third path having a third path length to the beam combining device; and

the beam combining device that is adapted to receive the third sub-pulse and fifth sub-pulse from the second beam splitting device and the fourth sub-pulse and the sixth sub-pulse from the second plurality of mirrors.

7. The apparatus of claim 1, wherein the energy source assembly comprises:

a first energy source that is adapted to deliver a first portion of the first energy pulse;

a second energy source that is adapted to deliver a second portion of the first energy pulse; and

a controller that is adapted to offset the delivery of the first portion and the second portion in time.

8. The apparatus of claim 1, wherein the second lens has an optical property causing the one or more images received by the micro-lenses in the first micro-lens array to vary for two or more micro-lenses between the center and the edge of the first micro-lens array by varying a quadratic phase error.

9. An apparatus for thermally processing a substrate, comprising:

a first energy source that has an output that is adapted to deliver a first energy pulse;

a second energy source that has an output that is adapted to deliver a second energy pulse;

a pulse stretching device that comprises;

a first beam splitting device that is adapted to split the first pulse delivered from the energy source into a first sub-pulse and a second sub-pulse, and the second energy pulse delivered from the energy source into a third sub-pulse and a fourth sub-pulse, wherein the first sub-pulse and the third sub-pulse are transferred along a first path having a first length to a beam combining device; and

a first plurality of mirrors that are aligned to reflect the second sub-pulse and the fourth sub-pulse received from the first beam splitting device along a second path having a second length to the beam combining device;

a first micro-lens array having a plurality of micro-lenses that are adapted to receive at least a portion of the first energy pulse and a portion of the second energy pulse;

a second micro-lens array having a plurality of micro-lenses that are adapted to receive at least a portion of the energy transmitted from the first micro-lens array;

a first lens that is positioned to receive the at least a portion of the energy transmitted from the micro lenses in the second micro-lens array and transmit the energy received from the second micro-lens array;

a second lens that is positioned to receive at least a portion of the first energy pulse and cause one or more images received by the micro-lenses in the first micro-lens array to vary for two or more micro-lenses between a center and an edge of the first micro-lens array;

a random diffuser that is positioned to receive at least a portion of the first energy pulse and a portion of the second energy pulse and transmit the at least a portion of the first energy pulse and a portion of the second energy pulse to the first micro-lens array, wherein the random diffuser is adapted to receive at least a portion of the first sub-pulse, the second sub-pulse, the third sub-pulse, and the fourth sub-pulse delivered from the beam combining device; and

a controller that is adapted to synchronize the delivery of the first energy pulse and the second energy pulse, wherein a composite pulse formed by summing the first energy pulse and the second energy pulse over time has a pulse width that is greater than a pulse width of the first energy pulse and the second energy pulse.

10. The apparatus of claim 9, further comprising a processing chamber that comprises:

one or more walls that enclose a processing region, wherein one of the one or more walls is adapted to transmit at least a portion of the energy delivered in the first energy pulse and the second energy pulse;

a substrate support supporting a substrate that is positioned to receive at least a portion of the energy transferred in the first energy pulse and the second energy pulse through the one of the one or more walls; and

a heat exchanging device that is adapted to heat the substrate positioned on the substrate support.

11. The apparatus of claim 9, further comprising a shutter that is adapted to selectively allow the first and second energy pulses to be transferred to the pulse stretching device by use of the controller.