Configurable charged-particle apparatus

• US 8,829,470 B2
• Filed: 10/22/2013
• Issued: 09/09/2014
• Est. Priority Date: 10/22/2012
• Status: Active Grant

• Current Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Original Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Inventors: {hacek over (S)}estak, Josef, T{dot over (u)}ma, Lubomir
• Primary Examiner(s): LOGIE, MICHAEL J
• Application Number:
  US14/060,170
• Publication Number:
  US 20140110597A1
• Time in Patent Office: 322 Days
• Field of Search: 250/306, 250/307, 250/310, 250/311, 250/440.11, 250/441.11, 250/442.11
• US Class Current: 250/442.11
• CPC Class Codes: G21K 5/08 Holders for targets or for other objects to be irradiated
• CPC Class Codes: H01J 2237/1035 Immersion lens
• CPC Class Codes: H01J 2237/1415 Bores or yokes, i.e. magnetic circuit in general
• CPC Class Codes: H01J 2237/2802 Transmission microscopes
• CPC Class Codes: H01J 2237/2813 characterised by the application
• CPC Class Codes: H01J 37/1413 Means for interchanging parts of the lens, e.g. pole pieces, within the tube mechanically adjusting electron (ion) optical components H01J37/15
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Abstract

The invention relates to a charged-particle apparatus having

• • a charged particle source with an optical axis;
  • a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and
  • a first sample stage movable with respect to the optical axis.

The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

Claims

1. A configurable charged-particle apparatus equipped with:

a charged particle column comprising;

a charged particle source for producing a beam of charged particles along an optical axis; and

a magnetic immersion lens for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole, said first lens pole forming the part of the magnetic immersion lens farthest from the charged particle source;

an excitation coil surrounding the first lens pole;

at least a first stage on which a sample can be mounted, the first stage movable with respect to the optical axis; and

one or more detectors for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample;

the immersion lens having a configurable magnetic circuit;

wherein;

the apparatus has at least a first configuration and a second configuration, the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole mounted on the first stage, the second lens pole intersecting the optical axis, and the apparatus in the second configuration equipped with a second stage for mounting the sample thereon, the second stage equipped to position the sample between the first lens pole and the second lens pole, the second stage movable with respect to the optical axis,

as a result of which the optical properties of the magnetic immersion lens differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

2. The configurable charged-particle apparatus of claim 1 in which the charged particle source is an electron source;

the second lens pole has a central bore; and

in the second configuration a detector for detecting electrons that passed through the sample is positioned below the bore, the bore for passing electrons that passed through the sample, the particle-optical apparatus thus capable of operating as a Scanning Transmission Electron Microscope.

3. The configurable charged-particle apparatus of claim 2 in which a lens is mounted between the second lens pole and the detector for detecting electrons that passed through the sample, as a result of which the magnification between sample plane and detector plane is changed, more specifically the angular magnification.

4. The configurable charged-particle apparatus of claim 1 in which the detector for detecting electrons that passed through the sample is mounted on the second lens pole.

5. The configurable charged-particle apparatus of claim 1 in which in the second configuration the second lens pole can be translated in three orthogonal directions with respect to the first lens pole.

6. The configurable charged-particle apparatus of claim 5 in which in the second configuration several sub-configurations are defined, the sub-configurations differing in the distance of the first lens pole to the second lens pole, the change in sub-configurations realized by a movement of the first stage along the optical axis.

7. The configurable charged-particle apparatus of claim 1 in which in the first configuration the second lens pole is parked in a stationary position in the sample chamber, the stationary position removed from the optical axis as a result of which the second lens pole, when parked in the stationary position, does not form part of the magnetic circuit of the magnetic immersion lens.

8. The configurable charged-particle apparatus of claim 1 in which in the first configuration the second lens pole is mounted on a part of the first stage that is removed from the optical axis, so that the second lens pole does not form part of the magnetic circuit of the magnetic immersion lens.

9. The configurable charged-particle apparatus of claim 1 in which the apparatus is equipped with a controller programmed to change the lens configuration from the first configuration to the second configuration.

10. The configurable charged-particle apparatus of claim 1 in which the apparatus comprises an ion column with an ion source for machining a sample, an electron column with an electron source for imaging a sample, and a manipulator for positioning a sample attached to said manipulator, the electron column equipped with the magnetic immersion lens, the ion column producing an ion beam and the electron column producing an electron beam, the ion beam and the electron beam in the first configuration intercepting each other.

11. A method of using the configurable charged-particle apparatus of claim 10, in which the apparatus is equipped with a manipulator for attaching and manipulating a lamella, the method comprising the steps of repeatedly:

loading a sample into the apparatus onto the first stage;

extracting a lamella from the sample using the ion beam;

attaching the lamella to the manipulator;

thinning the lamella;

positioning the lamella for imaging with the electron column;

imaging at least part of the lamella;

wherein;

before loading the sample into the apparatus onto the first stage, bringing the apparatus in the first configuration;

after attaching the lamella to the manipulator removing the sample from the first stage and bringing the apparatus in the second configuration,

positioning the lamella for imaging with the electron column involves positioning the lamella between the first and the second lens pole.

12. The method of claim 11 in which the lamella is attached to the second stage and detached from the manipulator before imaging.

13. The method of claim 11 in which the loading involves loading with an automated loader a sample from a cassette with samples.

14. The method of claim 11 in which the distance between the first lens pole and the second lens pole is varied in several sub-configurations of the second configuration, the change in sub-configurations realized by a movement of the first stage along the optical axis.

15. The method of claim 11 in which the apparatus is equipped with a controller programmed to change the lens configuration from the first configuration to the second configuration.

16. The method of claim 11 in which in the first configuration the second lens pole is mounted on a part of the first stage that is removed from the optical axis, so that the second lens pole does not form part of the magnetic circuit of the magnetic immersion lens.

17. The method of claim 11 in which in the first configuration the second lens pole is parked in a stationary position in the sample chamber, the stationary position removed from the optical axis as a result of the which the second lens pole, when parked in the stationary position, does not form part of the magnetic circuit of the magnetic immersion lens.

18. The method of claim 11 in which the second lens pole has a central bore;

and in the second configuration, imaging the lamella comprises detecting electrons that passed through the sample by a detector positioned below the bore, the bore for passing electrons that passed through the sample.

19. The configurable charged-particle apparatus of claim 1 in which the apparatus is equipped with an automatic loader for loading samples from a sample cassette to the first stage and/or second stage.

20. The configurable charged-particle apparatus of claim 1 in which the apparatus is equipped with an automatic loader for loading lens poles from a lens pole cassette to the first stage.