MEMS switches and fabrication methods

• US 8,829,626 B2
• Filed: 09/04/2013
• Issued: 09/09/2014
• Est. Priority Date: 12/06/2010
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Gambino, Jeffrey P., Mongeon, Stephen A.
• Primary Examiner(s): Roman, Angel
• Application Number:
  US14/017,646
• Publication Number:
  US 20140209442A1
• Time in Patent Office: 370 Days
• Field of Search: 257/415, 257/417
• US Class Current: 257/414
• CPC Class Codes: B81B 2201/014 having a cantilever fixed on one side connected to one or more dimples
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81C 1/00293 maintaining a controlled atmosphere with processes not provided for in B81C1/00285
• CPC Class Codes: B81C 2203/0145 Hermetically sealing an opening in the lid
• CPC Class Codes: H01H 2001/0052 Special contact materials used for MEMS
• CPC Class Codes: H01H 2059/0027 Movable electrode connected to ground in the open position, for improving isolation
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

MEMS switches and methods of fabricating MEMS switches. The switch has a vertically oriented deflection electrode having a conductive layer supported by a supporting layer, at least one drive electrode, and a stationary electrode. An actuation voltage applied to the drive electrode causes the deflection electrode to deflect laterally and contact the stationary electrode, which closes the switch. The deflection electrode is restored to a vertical position when the actuation voltage is removed, thereby opening the switch. The method of fabricating the MEMS switch includes depositing a conductive layer on mandrels to define vertical electrodes and then releasing the deflection electrode by removing the mandrel and layer end sections.

Claims

1. A microelectromechanical (MEMS) switch formed on a supporting layer having a top surface, the MEMS device comprising:

a stationary electrode including a conductive layer with a vertical orientation relative to the top surface of the supporting layer;

at least one drive electrode; and

a deflection electrode including a conductive layer with a vertical orientation relative to the top surface of the supporting layer, and the deflection electrode configured to be electrostatically attracted toward the at least one drive electrode, when the at least one drive electrode is electrically biased, with a cantilevered motion so that the conductive layer of the deflection electrode contacts the conductive layer of the stationary electrode.

2. The MEMS switch of claim 1 wherein the stationary electrode is positioned on the top surface of the supporting layer such that the conductive layer of the stationary electrode and that the conductive layer of the deflection electrode have respective confronting surfaces.

3. The MEMS switch of claim 2 wherein the confronting surface of the conductive layer of the deflection electrode has a larger surface area than the confronting surface of the conductive layer of the stationary electrode.

4. The MEMS switch of claim 2 wherein the at least one drive electrode comprises a first drive electrode and a second drive electrode, the stationary electrode is positioned laterally between the first drive electrode and the second drive electrode, and the conductive layer of the stationary electrode is separated from the conductive layer of the deflection electrode by a first gap smaller than a second gap between the conductive layer of the deflection electrode and the first and second drive electrodes.

5. The MEMS switch of claim 1 wherein the conductive layer of the deflection electrode has a first portion and a second portion spaced vertically from the first portion, the second portion of the conductive layer of the deflection electrode contacts the conductive layer of the stationary electrode during the cantilevered motion, and further comprising:

a first contact on the top surface of the supporting layer, the first contact mechanically coupled with the first portion of the conductive layer of the deflection electrode so that the first contact and the conductive layer of the deflection electrode are electrically coupled.

6. The MEMS switch of claim 5 further comprising:

a second contact on the top surface of the supporting layer, the second contact mechanically coupled with the conductive layer of the stationary electrode so that the second contact and the conductive layer of the stationary electrode are electrically coupled.

7. The MEMS switch of claim 1 wherein the deflection electrode further includes a dielectric layer comprised of a dielectric material, and the dielectric layer of the deflection electrode is coextensive with the conductive layer of the deflection electrode.

8. The MEMS switch of claim 1 wherein the conductive layer of the deflection electrode and the conductive layer of the stationary electrode are separated by a contact gap bridged when the conductive layer of the deflection electrode contacts the conductive layer of the stationary electrode.

9. The MEMS switch of claim 8 wherein the deflection electrode includes a dielectric layer, and the conductive layer of the deflection electrode is disposed between the dielectric layer of the deflection electrode and the conductive layer of the stationary electrode.

10. The MEMS switch of claim 1 further comprising:

a cap layer; and

a sacrificial layer between the cap layer and the supporting layer, the sacrificial layer including a cavity containing the stationary electrode, the at least one drive electrode, and the deflection electrode.

11. The MEMS switch of claim 1 further comprising:

a glass plate; and

a plurality of support columns separating the glass plate from the dielectric substrate to define a cavity containing the stationary electrode, the at least one drive electrode, and the deflection member.

12. The MEMS switch of claim 1 wherein the conductive layer of the stationary electrode and the conductive layer of the deflection electrode are aligned parallel to each other when the at least one drive electrode is not electrically biased.