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Microelectromechanical gyroscopes and related apparatus and methods

  • US 8,833,161 B2
  • Filed: 04/20/2011
  • Issued: 09/16/2014
  • Est. Priority Date: 04/20/2010
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a resonant structure having a plate, a drive electrode and a sense electrode, a temperature compensated stack, and a substrate,the resonant structure defining an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited, the plate formed from a piezoelectric material,the drive electrode for applying a voltage to the resonant structure to excite the resonant structure,the sense electrode for supplying a signal generated by the resonant structure in response to rotation of the resonant structure about the axis;

    the temperature compensated stack located between the plate and the substrate; and

    the resonant structure being suspended and coupled to the substrate by a plurality of anchors.

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