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Device for treating disc-like articles

  • US 8,833,380 B2
  • Filed: 08/25/2011
  • Issued: 09/16/2014
  • Est. Priority Date: 03/31/2009
  • Status: Active Grant
First Claim
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1. A device for treating a disc-like article with a fluid, the device comprising:

  • at least one dispenser for dispensing a fluid onto a disc-like article and a chuck for holding and rotating a disc-like article about an axis A perpendicular to the disc-like article, the chuck comprising a base body and gripping members for contacting the disc-like article at its edge,wherein the gripping members are radially movable with respect to the axis A,wherein the gripping members extend downwardly from an obliquely-inclined radially-inwardly facing annular surface of the base body, andwherein said obliquely-inclined surface surrounds the gripping members and extends downwardly to a level lower than a disc-like article when held by the gripping members.

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