Optical inspector with selective scattered radiation blocker

• US 8,836,935 B1
• Filed: 04/12/2013
• Issued: 09/16/2014
• Est. Priority Date: 04/12/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: Zeta Instruments, Inc. (KLA Corporation)
• Inventors: Meeks, Steven W., Kudinar, Rusmin, Nguyen, Hung P.
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): RAHMAN, MD M
• Application Number:
  US13/861,382
• Time in Patent Office: 522 Days
• Field of Search: 356/239.7
• US Class Current: 356/239.7
• CPC Class Codes: G01N 2021/8967 Discriminating defects on opposite sides or at different depths of sheet or rod
• CPC Class Codes: G01N 21/958 Inspecting transparent materials or objects, e.g. windscreens for conveyed flat sheet or rod G01N21/896

Abstract

An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, an aperture, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. A portion of the source beam travels through the transparent sample to another surface. The blocker blocks scattered radiation originating at the other surface. Scattered radiation originating from the transparent sample is not redirected by the blocker and is focused by the focusing lens to a first focal plane. The focused scattered radiation passes through the aperture before irradiating the detector. The detector output an intensity measurement of the scattered radiation that irradiates the detector.

Claims

1. An apparatus, comprising:

a time varying beam reflector;

a radiating source that irradiates the time varying beam reflector;

a waveplate that is positioned between the radiating source and the time varying beam reflector;

a telecentric scan lens that directs the radiation reflected by the time varying beam reflector onto a transparent sample and a stage, wherein the radiation reflected by the time varying beam reflector and directed by the telecentric scan lens produces a moving irradiated spot on the transparent sample and the stage, wherein the irradiation of the sample causes scattered radiation and specular reflected radiation to reflect from the transparent sample, wherein the irradiation of the stage causes scattered radiation to reflect from the stage, and wherein the telecentric scan lens directs the specular reflected radiation to the time varying beam reflector;

a focusing lens that receives scattered radiation from the transparent sample, wherein the focusing lens is orientated at an oblique angle to the plane of incidence of the moving irradiated spot on the transparent sample;

a blocker that redirects scattered radiation from the stage away from the focusing lens while not blocking scattered radiation from the transparent sample, wherein the blocker is located between the focusing lens and the plane of incidence of the moving irradiated spot on the stage; and

a detector located near the focal plane of the focusing lens.

2. The apparatus of claim 1, wherein the focusing lens includes an aspheric lens and a plano-convex lens.

3. The apparatus of claim 1, wherein the focusing lens includes a first aspheric lens and a second aspheric lens.

4. The apparatus of claim 1, wherein the radiation reflected by the time varying beam reflector and directed by the telecentric scan lens produces a moving irradiated spot on the transparent sample and the stage, and wherein the time varying beam reflector is a rotating polygon.

5. The apparatus of claim 1, wherein the scattered radiation from the transparent sample includes a top surface scattered radiation generated from the top surface of the transparent sample and a bottom surface scattered radiation generated from the bottom surface of the transparent sample.

6. The apparatus of claim 1, further comprising:

a processor, wherein the processor receives signals from the detector, and wherein the processor determines a characteristic of the transparent sample based upon the signals received from the detector.

7. The apparatus of claim 1, wherein the scattered radiation from the transparent sample does not include specular reflection.

8. The apparatus of claim 1, wherein the radiating source is a laser, wherein the detector includes a photomultiplier tube, and wherein the blocker is opaque.

9. The apparatus of claim 1, wherein the blocker is fixed in position with respect to the telecentric scan lens.

10. The apparatus of claim 1, further comprising:

a processor; and

a motor that drives the time varying beam reflector, wherein the processor communicates with the any combination of;

the detector, the radiating source, and the motor.

11. A method, comprising:

(a) irradiating a first position of a time varying beam reflector;

(b) directing the radiation from the time varying beam reflector onto a transparent sample and a stage, wherein the radiation reflected by the time varying beam reflector and directed by a telecentric scan lens produces a moving irradiated spot on the transparent sample and the stage, wherein the irradiation of the transparent sample causes scattered radiation to reflect from the transparent sample, and wherein the irradiation of the stage causes scattered radiation to reflect from the stage;

(c) blocking scattered radiation from the stage while not blocking scattered radiation from the transparent sample wherein the blocking is performed by a blocker located between the focusing lens and the plane of incidence of the moving irradiated spot on the stage;

(d) focusing scattered radiation from the transparent sample to a focal plane of the focusing lens;

(e) measuring the intensity of the specular reflection from the transparent sample;

(f) measuring the intensity of the focused scattered radiation from the transparent sample; and

(g) determining which surface of the transparent sample the scattered radiation originated.

12. The method of claim 11, wherein the irradiating of (a) is performed by a laser source, wherein the directing of (b) is performed by a telecentric scan lens, wherein the time varying beam reflector is a rotating polygon, and wherein the blocking of (c) is performed by an opaque surface.

13. The method of claim 11, wherein the focusing of (d) is performed by a camera lens.

14. The method of claim 11, wherein the focusing of (d) is performed by an aspheric lens and a plano-convex lens.

15. The method of claim 11, wherein the focusing of (d) is performed by a first and second aspheric lens.

16. The method of claim 11, wherein the measuring of (f) is performed by a photomultiplier tube.

17. A device comprising:

a time varying beam reflector;

a radiating source that irradiates the time varying beam reflector;

a telecentric scan lens that directs the radiation reflected by the time varying beam reflector onto a transparent sample and a stage, wherein the radiation reflected by the time varying beam reflector and directed by the telecentric scan lens produces a moving irradiated spot on the transparent sample and the stage, wherein the irradiation of the transparent sample causes scattered radiation and specular reflected radiation to reflect from the transparent sample, wherein the irradiation of the stage causes scattered radiation to reflect from the stage, and wherein the telecentric scan lens directs the specular reflected radiation to the time varying beam reflector; and

means for blocking scattered radiation from the stage while not blocking scattered radiation from the transparent sample, and for detecting characteristics of the transparent sample and in response determining defects in the transparent sample.

18. The device of claim 17, wherein the means include a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, and a photomultiplier tube.

19. The device of claim 17, wherein the means include a time varying beam reflector, a blocker, a plano-convex lens, an aspheric lens, and a photomultiplier tube.