Fusion bonding process for glass

• US 8,839,643 B2
• Filed: 06/03/2009
• Issued: 09/23/2014
• Est. Priority Date: 06/11/2008
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Matsumoto, Satoshi
• Primary Examiner(s): Crispino, Richard
• Assistant Examiner(s): Krinker, Yana B
• Application Number:
  US12/994,539
• Publication Number:
  US 20110088431A1
• Time in Patent Office: 1,938 Days
• Field of Search: 65/36, 65/43, 65/45
• US Class Current: 65/36
• CPC Class Codes: B23K 26/324 involving non-metallic parts
• CPC Class Codes: C03C 17/04 by fritting glass powder
• CPC Class Codes: C03C 23/0025 by a laser beam
• CPC Class Codes: C03C 27/10 with the aid of adhesive specially adapted for that purpose

Abstract

When fixing a glass layer 3 to a glass member 4, a region to be fused R from an irradiation initiation position A in the region to be fused R to the irradiation initiation position A is irradiated therealong with a laser beam L1, and successively an unstable region extending from the irradiation initiation position A in the region to be fused R to a stable region initiation position B is therealong irradiated with the laser beam L1 again, so as to remelt the glass layer 3 in the unstable region, turn the unstable region into a stable region, and then fix the glass layer 3 to the glass member 4. Thereafter, a laser beam L2 fuses glass members 4, 5 together through the glass layer 3 having the whole region to be fused R turned into the stable region, so as to yield a glass fusing structure 1.

Claims

1. A glass fusing method for manufacturing a glass fusing structure by fusing first and second glass members, the method comprising the steps of:

(a) disposing a glass layer on the first glass member along a ring-shaped region to be fused, the glass layer being formed by removing an organic solvent and a binder from a paste layer containing a glass powder, a laser-absorbing material, the organic solvent and the binder;

(b) irradiating the ring-shaped region to be fused therealong from an irradiation initiation position in the ring-shaped region to be fused around the ring-shaped region to be fused and back to the irradiation initiation position with a first laser beam;

(c) successively irradiating again a predetermined region extending from the irradiation initiation position in the ring-shaped region to be fused therealong with the first laser beam, wherein the predetermined region consists of an unstable region of the ring-shaped region to be fused, so as to melt the glass layer and fix the glass layer to the first glass member; and

(d) overlaying the second glass member on the first glass member having the glass layer fixed thereto such that the glass layer is interposed therebetween, and irradiating the ring-shaped region to be fused therealong with a second laser beam, so as to fuse the first and second glass members together,

wherein in the step of fixing the glass layer to the first glass member, melting the glass layer increases the laser beam absorptance of the glass layer.

2. A glass fusing method according to claim 1, wherein an irradiation power for irradiating the predetermined region therealong with the first laser beam in step (c) is lower than the irradiation power for initially irradiating the predetermined region therealong with the first laser beam in step (b).

3. A glass fusing method according to claim 2, wherein the irradiation power is lowered during irradiation of the predetermined region therealong with the first laser beam in step (c).

4. A glass layer fixing method for fixing a glass layer to a first glass member along a region to be fused in which the first glass member and a second glass member are adapted to be fused together, the method comprising the steps of:

(a) disposing the glass layer on the first glass member along the ring-shaped region to be fused, the glass layer being formed by removing an organic solvent and a binder from a paste layer containing a glass powder, a laser-absorbing material, the organic solvent and the binder;

(b) irradiating the ring-shaped region to be fused therealong from an irradiation initiation position in the ring-shaped region to be fused around the ring-shaped region to be fused and back to the irradiation initiation position with a first laser beam;

(c) successively irradiating again a predetermined region extending from the irradiation initiation position in the ring-shaped region to be fused therealong with the first laser beam again, wherein the predetermined region consists of an unstable region of the ring-shaped region to be fused, so as to melt the glass layer and fix the glass layer to the first glass member; and

,

(d) overlaying the second glass member on the first glass member having the glass layer fixed thereto such that the glass layer is interposed therebetween, and irradiating the ring-shaped region to be fused therealong with a second laser beam, so as to fuse the first and second glass members together,

wherein in the step of fixing the glass layer to the first glass member, melting the glass layer increases the laser beam absorptance of the glass layer.

5. A glass layer fixing method according to claim 4, wherein an irradiation power for irradiating the predetermined region therealong with the first laser beam in step (c) is lower than the irradiation power for initially irradiating the predetermined region therealong with the first laser beam in step (b).

6. A glass layer fixing method according to claim 5, wherein the irradiation power is lowered during irradiation of the predetermined region therealong with the first laser beam in step (c).