Anchor-tilt cancelling accelerometer

• US 8,839,670 B2
• Filed: 09/30/2011
• Issued: 09/23/2014
• Est. Priority Date: 11/24/2010
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Qiu, Jin, Seeger, Joe, Castro, Alexander, Tchertkov, Igor, Li, Richard
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/249,902
• Publication Number:
  US 20120125104A1
• Time in Patent Office: 1,089 Days
• Field of Search: 735/143.2, 735/143.8, 735/141.6, 735/143.6, 735/143.3
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/02 by making use of inertia forces using solid seismic massesG01P15/14 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.

Claims

1. An accelerometer, comprising:

a mechanical structure, comprising;

a substrate;

an anchor coupled to the substrate;

a support arm rigidly coupled to the anchor; and

a first proof mass flexibly coupled to the support arm, wherein the first proof mass moves in response to acceleration of the accelerometer;

a first transducer configured to measure a first distance between a first reference area and a first portion of the mechanical structure;

a second transducer configured to measure a second distance between a second reference area and a second portion of the mechanical structure, the first portion of the mechanical structure being a portion of the first proof mass and the second portion of the mechanical structure being a portion of the support arm;

a signal processing circuit, coupled to the first transducer and the second transducer, is configured to measure the acceleration, wherein the signal processing circuit determines the motion of the first proof mass relative to the support arm.

2. The accelerometer of claim 1, wherein

the first transducer comprises a variable capacitor formed by a first fixed electrode and the first portion of the mechanical structure;

and

the second transducer comprises a variable capacitor formed by a second fixed electrode and the second portion of the mechanical structure.

3. The accelerometer of claim 1, wherein the mechanical structure further comprises a second proof mass flexibly coupled to the support arm that moves in response to acceleration.

4. The accelerometer of claim 3, wherein

the first portion of the mechanical structure is a portion of the first proof mass, and

the second portion of the mechanical structure is a portion of the second proof mass.

5. The accelerometer of claim 1, wherein

the mechanical structure is disposed in a plane;

the first proof mass is configured to rotate out of the plane in response to acceleration normal to the plane;

the first transducer is configured to measure the first distance normal to the plane; and

the second transducer is configured to measure the second distance normal to the plane.

6. The accelerometer of claim 1, wherein

the mechanical structure is disposed in a plane;

the first proof mass is configured to move in a first direction in the plane in response to acceleration in the first direction;

the first transducer is configured to measure the first distance in the first direction; and

the second transducer is configured to measure the second distance in the first direction.

7. The accelerometer of claim 1, wherein

the mechanical structure is disposed in a plane;

and

the substrate is disposed parallel to the plane below the mechanical structure.

8. The accelerometer of claim 7, further comprising a top substrate disposed parallel to the plane above the mechanical structure and coupled to the anchor.

19. The accelerometer of claim 2, wherein the first fixed electrode is disposed between the first proof mass and the substrate, the second fixed electrode is disposed between the support arm and the substrate.

9. An accelerometer, comprising:

a mechanical structure, comprising;

a substrate;

an anchor coupled to the substrate;

a support arm coupled to the anchor; and

a first proof mass flexibly coupled to the support arm that moves in response to

acceleration, the first portion of the mechanical structure being a portion of the first proof mass and the second portion of the mechanical structure being a portion of the support arm;

a first electrode configured to measure a first distance between a first reference area and a first portion of the mechanical structure;

a second electrode configured to measure a second distance between a second reference area and a second portion of the mechanical structure;

a signal processing circuit coupled to the first electrode and the second electrode configured to produce an output responsive to acceleration and not responsive to anchor motion.

10. The accelerometer of claim 9, wherein

the mechanical structure is disposed in a plane;

the first proof mass is configured to rotate out of the plane in response to acceleration normal to the plane;

the first electrode is configured to measure the first distance normal to the plane; and

the second electrode is configured to measure the second distance normal to the plane.

11. The accelerometer of claim 9, wherein

the mechanical structure is disposed in a plane;

the first proof mass is configured to move in a first direction in the plane in response to acceleration in the first direction;

the first electrode is configured to measure the first distance in the first direction; and

the second electrode is configured to measure the second distance in the first direction.

12. The accelerometer of claim 9, wherein

the mechanical structure is disposed in a plane;

and

the substrate is disposed parallel to the plane below the mechanical structure.

13. The accelerometer of claim 12, further comprising a top substrate disposed parallel to the plane above the mechanical structure and coupled to the anchor.

14. The accelerometer of claim 9, wherein the support arm is rigid.

15. The accelerometer of claim 9, wherein the support arm is flexible.

16. The accelerometer of claim 9, wherein the mechanical structure further comprises a second proof mass flexibly coupled to the support arm that moves in response to acceleration.

17. The accelerometer of claim 16, wherein

the first portion of the mechanical structure is a portion of the first proof mass;

and

the second portion of the mechanical structure is a portion of the second proof mass.

18. An accelerometer, comprising:

means for measuring a first distance between a first reference area and a first portion of a mechanical structure, wherein the mechanical structure comprises a substrate, an anchor coupled to the substrate, a support arm rigidly coupled to the anchor, and a first proof mass flexibly coupled to the support arm that moves in response to acceleration;

means for measuring a second distance between a second reference area and a second portion of the mechanical structure, the first portion of the mechanical structure being a portion of the first proof mass and the second portion of the mechanical structure being a portion of the support arm; and

means for generating an output responsive to acceleration and not responsive to anchor motion.