Apparatus for thin-film deposition
First Claim
1. An apparatus for depositing a thin film onto a surface of a substrate using precursor gases, the apparatus comprising:
- a supporting device configured to hold the substrate; and
a spinner positioned adjacent to the supporting device, the spinner having;
a hub for connecting to a motor; and
one or more blades connected to the hub,wherein the one or more blades are operative to rotate around the hub on a plane to drive a fluid flow of the precursor gases, so as to distribute the precursor gases across the surface of the substrate; and
each of the one or more blades has a drive face inclined at an oblique angle to the plane for driving the distribution of the precursor gases across the surface of the substrate.
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Accused Products
Abstract
An apparatus 101 for depositing a thin-film onto a surface of a substrate 113 using precursor gases G1, G2 is disclosed. The apparatus 101 comprises i) a supporting device 111 for holding the substrate 113; and ii) a spinner 105 positioned adjacent to the supporting device 111. Specifically, the spinner 105 includes a hub 106 for connecting to a motor, and one or more blades 201 connected to the hub 106. In particular, the one or more blades 201 are operative to rotate around the hub 106 on a plane to drive a fluid flow of the precursor gases G1, G2, so as to distribute the precursor gases G1, G2 across the surface of the substrate 113.
23 Citations
14 Claims
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1. An apparatus for depositing a thin film onto a surface of a substrate using precursor gases, the apparatus comprising:
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a supporting device configured to hold the substrate; and a spinner positioned adjacent to the supporting device, the spinner having; a hub for connecting to a motor; and one or more blades connected to the hub, wherein the one or more blades are operative to rotate around the hub on a plane to drive a fluid flow of the precursor gases, so as to distribute the precursor gases across the surface of the substrate; and each of the one or more blades has a drive face inclined at an oblique angle to the plane for driving the distribution of the precursor gases across the surface of the substrate. - View Dependent Claims (2, 4, 5, 6, 7, 8, 9, 10)
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3. An apparatus for depositing a thin film onto a surface of a substrate using precursor gases, the apparatus comprising:
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a supporting device configured to hold the substrate; and a spinner positioned adjacent to the supporting device, the spinner having; a hub for connecting to a motor; and one or more blades connected to the hub, wherein the one or more blades are operative to rotate around the hub on a plane to drive a fluid flow of the precursor gases, so as to distribute the precursor gases across the surface of the substrate; and each of the one or more blades is an airfoil. - View Dependent Claims (11, 12, 13, 14)
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Specification