Reusable substrates for electronic device fabrication and methods thereof

• US 8,841,207 B2
• Filed: 04/04/2012
• Issued: 09/23/2014
• Est. Priority Date: 04/08/2011
• Status: Expired due to Fees

• Current Assignee: Lux Material Co., Ltd.
• Original Assignee: Lux Material Co., Ltd.
• Inventors: Zhang, Baoguo
• Primary Examiner(s): FOURSON III, GEORGE R
• Application Number:
  US13/439,677
• Publication Number:
  US 20130095640A1
• Time in Patent Office: 902 Days
• Field of Search: 257/E21.601, 257/E21.103, 438/458, 438/459, 438/479, 438/977, 438/492, 148/33.2, 117/97
• US Class Current: 438/492
• CPC Class Codes: H01L 21/02521 Materials
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 2221/68318 Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
• CPC Class Codes: H01L 31/02366 of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
• CPC Class Codes: Y10T 428/2457 Parallel ribs and/or grooves

Abstract

Substrates for electronic device fabrication and methods thereof. A reusable substrate with at least a plurality of grooves for electronic device fabrication includes a substrate body made of one or more substrate materials and including a top planar surface, the top planar surface being divided into a plurality of planer regions by the plurality of grooves, the plurality of grooves including a plurality of bottom planar surfaces. Each of the plurality of grooves includes a bottom planar surface and two side surfaces, the bottom planar surface being selected from the plurality of bottom planar surfaces, the two side surfaces being in contact with the top surface and the bottom surface. The bottom planar surface is associated with a groove width from one of the two side surfaces to the other of the two side surfaces, the groove width ranging from 0.1 μm to 5 mm.

Claims

1. A method for using a reusable substrate made of a first material with a plurality of grooves for electronic device fabrication, said method comprising:

preparing a reusable substrate including a top planar surface, the top planar surface being divided by a plurality of grooves into a plurality of planar regions, the plurality of planar regions including a plurality of planar bottom surfaces parallel to the top planar surface;

forming a first epitaxial layer made of a second material on the plurality of planar regions, the first epitaxial layer being in direct contact with the top planar surface;

separating the first epitaxial layer from each of the plurality of planar regions, the first epitaxial layer being separated directly from the top planar surface; and

after the first epitaxial layer is separated from each of the plurality of planar regions, forming a second epitaxial layer made of a third material on the plurality of planar regions, the second epitaxial layer being in direct contact with the top planar surface.

2. The method of claim 1, and further comprising:

lapping the reusable substrate after the first epitaxial layer is separated from the reusable substrate;

annealing the reusable substrate;

polishing the reusable substrate; and

cleaning the reusable substrate.

3. The method of claim 1, and further comprising:

separating the second epitaxial layer from each of the plurality of planar regions; and

after the second epitaxial layer is separated from the plurality of planar regions, forming a third epitaxial layer on the plurality of planar regions, the third epitaxial layer being in direct contact with the top planar surface.

4. The method of claim 1 wherein the process for separating the first epitaxial layer from each of the plurality of planar regions is performed using a laser lift-off technique.

5. The method of claim 1 wherein after the first epitaxial layer is separated from each of the plurality of planar regions, using the separated first epitaxial layer to fabricate one or more light emitting diodes.

6. The method of claim 1 wherein the first material has a lattice constant different from the second material.

7. The method of claim 1 wherein the first material has a lattice constant different from the third material.

8. The method of claim 1 wherein the second material and the third material are the same.

9. The method of claim 1 wherein the second material and the third material are different.

10. The method of claim 1 wherein the reusable substrate is made of at least one selected from a group consisting of mono-crystalline sapphire, mono-crystalline SiC, mono-crystalline GaN, mono-crystalline GaAs, mono-crystalline Si, mono-crystalline AlN, mono-crystalline ZnO, and mono-crystalline MgO.

11. The method of claim 1 wherein the second material includes one selected from a group consisting of gallium nitride and aluminum nitride.

12. The method of claim 1 wherein the third material includes one selected from a group consisting of gallium nitride and aluminum nitride.

13. The method of claim 1 wherein after the first epitaxial layer is separated from each of the plurality of planar regions, the separated first epitaxial layer is used, without further processing, for fabricating one or more electronic devices.

14. The method of claim 1 wherein after the first epitaxial layer is separated from each of the plurality of planar regions, the separated first epitaxial layer is further processed before being used for fabricating one or more electronic devices.