Capacitive sensing system

• US 8,841,920 B2
• Filed: 10/28/2013
• Issued: 09/23/2014
• Est. Priority Date: 12/31/2009
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: Mapper Lithography IP B.V (ASML Holding NV)
• Inventors: De Boer, Guido, Van Baar, Johnny Joannes Jacobus, Padhye, Kaustubh Prabodh, Mossel, Robert, Vergeer, Niels, Steenbrink, Stijn Willem Herman Karel
• Primary Examiner(s): Nguyen, Vincent Q
• Application Number:
  US14/064,255
• Publication Number:
  US 20140049276A1
• Time in Patent Office: 330 Days
• Field of Search: 324660-662
• US Class Current: 324/600
• CPC Class Codes: G01B 7/023 for measuring distance between sensor and object G01B7/082 and G01B7/102 take precedence
• CPC Class Codes: G01D 3/036 on measuring arrangements themselves
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: G03F 9/7053 Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves

Abstract

The invention relates to a lithography system. The lithography system has a projection lens system and a capacitive sensing system. The projection lens system is provided with a final projection lens. The capacitive sensing system is arranged for making a measurement related to a distance between the final projection lens and a target. The capacitive sensing system includes at least one capacitive sensor. Additional, the capacitive sensing system is provided with a flexible printed circuit structure and at least one integrated flex print connector. The at least one sensor is located in the flexible printed circuit structure. The flexible printed circuit structure has a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks. The conductive tracks extend from the electrodes along the at least one integrated flex print connector.

Claims

1. A lithography system comprising:

a projection lens system comprising a final projection lens; and

a capacitive sensing system for making a measurement related to a distance between the final projection lens and a target, the capacitive sensing system comprising at least one capacitive sensor,

wherein the capacitive sensing system comprises a flexible printed circuit structure comprising the at least one sensor and at least one integrated flex print connector, the flexible printed circuit structure comprising a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks; and

wherein the conductive tracks extend from the electrodes along the at least one integrated flex print connector.

2. The system according to claim 1, wherein the at least one integrated flex print connector is folded and extends upwards from the flexible base.

3. The system according to claim 1, wherein the at least one integrated flex print connector is connected to a flexible membrane for connection to remote circuitry, and wherein the conductive tracks extending along the at least one integrated flex print connector further extend along the flexible membrane.

4. The system according to claim 3, wherein the flexible base takes the form of an annular ring with an outer edge, and wherein two or more integrated flex print connectors are folded and extend upwards from the outer edge of the annularly ring-shaped flexible base.

5. The system according to claim 4, wherein the flexible membrane is connected to the two or more integrated flex print connectors extending upwards from the annularly ring-shaped flexible base, the flexible membrane forming a curved structure.

6. The system according to claim 3, wherein the at least one integrated flex print connector is folded.

7. The system according to claim 1, wherein the capacitive sensing system comprises two or more capacitive sensors and wherein each capacitive sensor is located in the flexible base and comprises a thin film structure comprising a sensing electrode and a back guard electrode.

8. The system according to claim 7, wherein the thin film structure comprises

a first conductive film comprising the sensing electrode and a first one of the conductive tracks;

a second conductive film comprising the back guard electrode and a second one of the conductive tracks;

wherein the first conductive film and the second conductive film are separated by an insulating layer.

9. The system according to claim 8, wherein the second one of the conductive tracks is wider than the first one of the conductive tracks, such that the second one of the conductive tracks has a peripheral portion functioning as a side guard electrode for the first one of the conductive tracks.

10. The system according to claim 8, wherein the thin film structure further comprises a third conductive film comprising a third one of the conductive tracks, wherein the first conductive film is arranged between the second conductive film and the third conductive film, the conductive films being separated by insulating layers.

11. The system according to claim 10, wherein the third one of the conductive tracks is electrically connected to the second one of the conductive tracks.

12. The system according to claim 10, wherein the third conductive film, at least partially, covers the first one of the conductive tracks, while refraining from coverage of the sensing electrode.

13. The system according to claim 8, wherein the thin film structure further comprises a fourth conductive film comprising a shield electrode and a fourth one of the conductive tracks, wherein the second conductive film is arranged between the first conductive film and the fourth conductive film, the conductive films being separated by insulating layers.

14. The system according to claim 13, wherein the thin film structure further comprises a fifth conductive film comprising a fifth one of the conductive tracks, wherein the first conductive film is arranged between the second conductive film and the fifth conductive film, the conductive films being separated by insulating layers.

15. The system according to claim 14, wherein the fifth one of the conductive tracks is electrically connected to the fourth one of the conductive tracks.

16. The system according to claim 8, wherein the thin film structure comprises:

a third conductive film comprising a third one of the conductive tracks;

a fourth conductive film comprising a shield electrode and a fourth one of the conductive tracks; and

a fifth conductive film comprising a fifth one of the conductive tracks;

wherein the first conductive film is arranged between the second conductive film and the third conductive film,

wherein the second conductive film is arranged between the first conductive film and the fourth conductive film, and

wherein the third conductive film is arranged between the first conductive film and the fifth conductive film,

the conductive films being separated by insulating layers.

17. The system according to claim 1, wherein the lithography system further comprises at least one cable, and at least one further connector for connecting the at least one cable with the integrated flex print connector.

18. The system according to claim 17, wherein the at least one cable is a triaxial cable.

19. The system according to claim 1,

wherein the lithography system further comprises a mounting plate, and

wherein the projection lens system, the capacitive sensing system, and the mounting plate form a single removable and replaceable structure.

20. The system according to claim 19, wherein the capacitive sensors of the capacitive sensing system and the final projection lens of the projection lens system are directly mounted on the mounting plate.

21. The system according to claim 19, wherein the capacitive sensing system comprises a flexible printed circuit structure comprising two or more capacitive sensors and at least one integrated flex print connector.

22. The system according to claim 21, wherein the flexible printed circuit structure comprises a flexible base provided with conductive electrodes and tracks.

23. The system according to claim 22, wherein the at least one integrated flex print connector is folded and extends upwards from the flexible base, and wherein conductive tracks extend from the electrodes along the at least one integrated flex print connector.

24. The system according to claim 23, wherein the at least one folded flex print connector is connected to a flexible membrane for connection to remote circuitry, and wherein the conductive tracks extending along the at least one integrated flex print connector further extend along the flexible membrane.

25. The system according to claim 21, wherein the at least one integrated flex print connector is connected to a flexible membrane, and wherein the conductive tracks extending along the at least one integrated flex print connector further extend along the flexible membrane, the flexible membrane extending to a single side of the removable and replaceable structure for connection to remote circuitry.

29. The system according to claim 17, wherein the capacitive sensing system further comprises at least one integrated flex print connector;

wherein the at least one integrated flex print connector is arranged such that the conductive tracks extend from the electrodes along the at least one integrated flex print connector; and

wherein the at least one integrated flex print connector is folded and extends upwards from the flexible base.

26. A capacitive sensing system for making a measurement related to a distance between two objects,

wherein the capacitive sensing system comprises at least one capacitive sensor, and wherein the capacitive sensing system comprises a flexible printed circuit structure comprising the at least one sensor and at least one integrated flex print connector, the flexible printed circuit structure comprising a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks;

wherein the flexible printed circuit structure comprises a capacitive sensor located in the flexible base, the capacitive sensor comprising a thin film structure comprising a sensing electrode and a back guard electrode; and

wherein the conductive tracks extend from the electrodes along the at least one integrated flex print connector.

27. A capacitive sensing system for making a measurement related to a distance between two objects;

wherein the capacitive sensing system comprises a flexible printed circuit structure comprising a flexible base provided with conductive electrodes and tracks;

wherein the flexible printed circuit structure comprises a capacitive sensor located in the flexible base, the capacitive sensor comprising a thin film structure comprising a sensing electrode and a back guard electrode,

wherein the thin film structure comprises;

a first conductive film comprising the sensing electrode and a first one of the conductive tracks;

a second conductive film comprising the back guard electrode and a second one of the conductive tracks; and

a third conductive film comprising a third one of the conductive tracks;

wherein the first conductive film is arranged between the second conductive film and the third conductive film, the conductive films being separated by insulating layers; and

wherein the third conductive film, at least partially, covers the first one of the conductive tracks, while refraining from coverage of the sensing electrode.

28. A lithography system comprising:

a projection lens system comprising a final projection lens; and

a capacitive sensing system for making a measurement related to a distance between the final projection lens and a target;

wherein the capacitive sensing system comprises a flexible printed circuit structure comprising a flexible base provided with conductive electrodes and tracks;

wherein the flexible printed circuit structure comprises a capacitive sensor located in the flexible base, the capacitive sensor comprising a thin film structure comprising a sensing electrode and a back guard electrode,

wherein the thin film structure comprises;

a first conductive film comprising the sensing electrode and a first one of the conductive tracks;

a second conductive film comprising the back guard electrode and a second one of the conductive tracks; and

a third conductive film comprising a third one of the conductive tracks;

wherein the first conductive film is arranged between the second conductive film and the third conductive film, the conductive films being separated by insulating layers; and

wherein the third conductive film, at least partially, covers the first one of the conductive tracks, while refraining from coverage of the sensing electrode.