Phase difference element and method for manufacturing the same
First Claim
1. A phase difference element comprising:
- a transparent substrate;
an obliquely vapor deposited multi-layer film formed by a plurality of layers of a dielectric material, the layers of the dielectric material being alternately vapor deposited from two directions differing by 180°
from each other, with the thicknesses of the respective layers being not greater than the wavelength of light in use; and
an interface anti-reflection film group composed by one or more of alternately high and low refractive index films stacked between the transparent substrate and the obliquely vapor deposited multi-layer film, the refractive index of the interface anti-reflection film group being higher than the refractive index of the transparent substrate and lower than the refractive index of the obliquely vapor deposited film.
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Accused Products
Abstract
A phase difference element capable of reducing reflection of incident light and a manufacturing method for the phase difference element are disclosed. The phase difference element includes a transparent substrate 11, an interface anti-reflection film group 12 and an obliquely vapor deposited film 13. The interface anti-reflection film group is composed by one or more of alternately high and low refractive index films, with the film thicknesses of the respectively films being equal to or less than the wavelength of light in use. The obliquely vapor deposited film is formed by a plurality of layers of a dielectric material. These layers are alternately obliquely vapor deposited from two directions differing by 180° from each other. The refractive index of the interface anti-reflection film group 12 is higher than the refractive index of the transparent substrate 11 and lesser than that of the obliquely vapor deposited film 13.
23 Citations
13 Claims
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1. A phase difference element comprising:
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a transparent substrate; an obliquely vapor deposited multi-layer film formed by a plurality of layers of a dielectric material, the layers of the dielectric material being alternately vapor deposited from two directions differing by 180°
from each other, with the thicknesses of the respective layers being not greater than the wavelength of light in use; andan interface anti-reflection film group composed by one or more of alternately high and low refractive index films stacked between the transparent substrate and the obliquely vapor deposited multi-layer film, the refractive index of the interface anti-reflection film group being higher than the refractive index of the transparent substrate and lower than the refractive index of the obliquely vapor deposited film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing a phase difference element comprising:
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alternately depositing one or more of high and low refractive index films on a transparent substrate to form an interface anti-reflection film group the refractive index of which is higher than the refractive index of the transparent substrate and lower than that of the obliquely vapor deposited film; and alternately obliquely depositing a dielectric material on the interface anti-reflection film group from two directions differing 180°
from each other to form a multi-layered obliquely vapor deposited film, with each component layer of the multi-layered obliquely vapor deposited film being of a thickness not greater than the wavelength of light in use.
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12. A liquid crystal projector comprising:
a phase difference element arranged between a polarization beam splitter and a liquid crystal cell, the phase difference element comprising; a transparent substrate; an obliquely vapor deposited multi-layer film formed by a plurality of layers of a dielectric material, the layers of the dielectric material being alternately vapor deposited from two directions differing by 180°
from each other, with the thicknesses of the respective layers being not greater than the wavelength of light in use; andan interface anti-reflection film group composed by one or more of alternately high and low refractive index films stacked between the transparent substrate and the obliquely vapor deposited multi-layer film, the refractive index of the interface anti-reflection film group being higher than the refractive index of the transparent substrate and lower than the refractive index of the obliquely vapor deposited film.
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13. An optical implement carrying thereon a phase difference element comprising:
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a transparent substrate; an obliquely vapor deposited multi-layer film formed by a plurality of layers of a dielectric material, the layers of the dielectric material being alternately vapor deposited from two directions differing by 180°
from each other, with the thicknesses of the respective layers being not greater than the wavelength of light in use; andan interface anti-reflection film group composed by one or more of alternately high and low refractive index films stacked between the transparent substrate and the obliquely vapor deposited multi-layer film, the refractive index of the interface anti-reflection film group being higher than the refractive index of the transparent substrate and lower than the refractive index of the obliquely vapor deposited film.
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Specification