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Inertial force sensor

  • US 8,844,356 B2
  • Filed: 04/12/2013
  • Issued: 09/30/2014
  • Est. Priority Date: 01/24/2006
  • Status: Active Grant
First Claim
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1. An inertial force sensor comprising:

  • a detecting device which detects an inertial force, wherein the detecting device includes;

    two first beams,two second beams each comprising beam portions extending from one of the first beams,each end of the two second beams has at least one folding portion,whereineach end of the two second beams are capable of being driven and oscillated in a first direction,two different directions of angular velocity are detected by detecting Coriolis force corresponding to the driving and oscillation.

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