Inertial force sensor

• US 8,844,356 B2
• Filed: 04/12/2013
• Issued: 09/30/2014
• Est. Priority Date: 01/24/2006
• Status: Active Grant

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: Ohuchi, Satoshi, Aizawa, Hiroyuki, Terada, Jiro, Ishida, Takami, Satou, Ichirou, Ohkoshi, Hideo, Ashimori, Yohei
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US13/861,612
• Publication Number:
  US 20130228012A1
• Time in Patent Office: 536 Days
• Field of Search: 735/040.4, 735/041.2, 735/041.6, 735/143.6
• US Class Current: 73/504.04
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719
• CPC Class Codes: G01C 19/5642 using vibrating bars or beams
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Claims

1. An inertial force sensor comprising:

a detecting device which detects an inertial force, wherein the detecting device includes;

two first beams,

two second beams each comprising beam portions extending from one of the first beams,

each end of the two second beams has at least one folding portion,

wherein

each end of the two second beams are capable of being driven and oscillated in a first direction,

two different directions of angular velocity are detected by detecting Coriolis force corresponding to the driving and oscillation.

2. The inertial force sensor according to claim 1, wherein

each end of the two second beams are driven and oscillated at the same phase.

3. The inertial force sensor according to claim 1, wherein

acceleration is detected by detecting distortion of the detecting device.

4. The inertial force sensor according to claim 1, wherein

the detecting device further includes a weight portion formed at each end of the second beams.

5. The inertial force sensor according to claim 1, wherein

each end of the second beams are folded in meander shape.

6. The inertial force sensor according to claim 1, wherein

the two first beams extend from an anchor portion, and

the anchor portion is fixed to a substrate.

7. The inertial force sensor according to claim 6, wherein

two first beams extend in opposite directions from the anchor portion.

8. The inertial force sensor according to claim 7, wherein

the two second beams are symmetrical relative to a first line.

9. The inertial force sensor according to claim 8, wherein

the two first beams are arranged on a second line.

10. The inertial force sensor according to claim 9, wherein

the first line and the second line are orthogonal to each other.

11. The inertial force sensor according to claim 10, wherein

the second line passes through a center of the anchor portion.

12. The inertial force sensor according to claim 1, wherein

the two second beams are longer than the first beams.