Shower plate having different aperture dimensions and/or distributions

• US 8,845,806 B2
• Filed: 10/22/2010
• Issued: 09/30/2014
• Est. Priority Date: 10/22/2010
• Status: Active Grant

• Current Assignee: ASM Japan K.K. (ASM International NV)
• Original Assignee: ASM Japan K.K. (ASM International NV)
• Inventors: Aida, Koei, Baba, Tomoyuki
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US12/910,607
• Publication Number:
  US 20120100307A1
• Time in Patent Office: 1,439 Days
• Field of Search: 118/715, 156/345.33, 156/345.34
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow

Abstract

A shower plate is adapted to be attached to the showerhead and includes a front surface adapted to face the susceptor; and a rear surface opposite to the front surface. The shower plate has multiple apertures each extending from the rear surface to the front surface for passing gas therethrough in this direction, and the shower plate has at least one quadrant section defined by radii, wherein the one quadrant section has an opening ratio of a total volume of openings of all the apertures distributed in the section to a total volume of the one quadrant section, which opening ratio is substantially smaller than an opening ratio of another quadrant section of the shower plate.

Claims

1. A shower plate adapted to be installed in a plasma deposition apparatus comprising a reaction chamber with a gate valve, a showerhead, and a susceptor, said shower plate being adapted to be attached to the showerhead and said shower plate comprising:

a front surface adapted to face the susceptor; and

a rear surface opposite to the front surface,

wherein the shower plate has multiple apertures each extending from the rear surface to the front surface for passing gas therethrough in this direction, and

the shower plate has at least one quadrant section defined by radii, wherein the one quadrant section has an opening ratio of a total volume of openings of all the apertures distributed in the one quadrant section to a total volume of the one quadrant section, said opening ratio being substantially smaller than an opening ratio of any other quadrant section of the shower plate,

wherein the at least one quadrant section includes a first, second and third regions, as viewed from the front, defined by lines each extending from the center of the shower plate to an outer periphery of the shower plate, the first region being disposed rotationally asymmetrically, the second and third regions being smaller than and disposed next to the first region, respectively, and

the first, second, and third regions have a first, second, and third opening ratios of a total volume of openings of all the apertures distributed in the respective regions to a total volume of the respective regions, wherein the second and third opening ratios are each smaller than the opening ratio of the any other quadrant section but are each greater than the first opening ratio.

2. The shower plate according to claim 1, wherein the one quadrant section includes smaller-front opening apertures, each having a front opening smaller than that of larger-front opening apertures in the region on the front surface.

3. The shower plate according to claim 2, wherein the any other quadrant section has apertures, each having a front opening which has substantially the same size as that of the larger-front opening apertures in the one quadrant section.

4. The shower plate according to claim 2, wherein each smaller-front opening aperture and each larger-front opening aperture in the one quadrant section has a rear opening on the rear surface, each rear opening having substantially the same size which is substantially the same as that of the front openings of the larger-front opening apertures in the one quadrant section.

5. The shower plate according to claim 2, wherein the one quadrant section has a density of the apertures which is substantially the same as that of the apertures in the any other quadrant section.

6. The shower plate according to claim 5, wherein the smaller-front opening apertures are substantially uniformly distributed. throughout the one quadrant section.

7. The shower plate according to claim 1, wherein the one quadrant section has a density of the apertures which is lower than that of the apertures in the any other quadrant section.

8. The shower plate according to claim 7, wherein all the apertures in the one and any other quadrant sections have substantially the same shape.

9. The shower plate according to claim 2, wherein the smaller-front opening apertures are locally distributed in an area of the one quadrant section, which area is smaller than the one quadrant section.

10. The shower plate according to claim 1, wherein the one quadrant section includes an area where a density of the apertures distributed therein is lower than that of the apertures distributed outside the area of the one quadrant section and in the any other quadrant section.

11. The shower plate according to claim 3, wherein 5% to 40% of all the apertures in the one quadrant section are the smaller front opening apertures.

12. The shower plate according to claim 1, wherein the first, second, and third regions include smaller-front opening apertures, each having a front opening smaller than that of larger-front opening apertures in the first, second, and third regions on the front surface, wherein the percentage of the smaller apertures relative to all the apertures in the second and third regions is lower than that in the first region.

13. The shower plate according to claim 12, wherein 5% to 40% of all the apertures in the first region are the smaller-front opening apertures, and 3% to 20% of all the apertures in the second and third regions are the smaller-front opening apertures.

14. The shower plate according to claim 1, wherein the first region is defined by radii, and an angle at the center defined by the radii is in a range of 30°

to 90°

, and wherein each of the second and third regions is defined by radii, and an angle at the center defined by the radii is in a range of 10°

to 45°

.

15. A plasma deposition apparatus comprising:

a reaction chamber having a gate valve;

a showerhead to which the shower plate of claim 1 is attached; and

a susceptor.

16. The shower plate according to claim 1, wherein the openings of each region are distributed uniformly through the region.