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Gas-barrier film, process for producing same, member for electronic device, and electronic device

  • US 8,846,200 B2
  • Filed: 09/16/2011
  • Issued: 09/30/2014
  • Est. Priority Date: 09/21/2010
  • Status: Active Grant
First Claim
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1. A gas barrier film comprising a base layer, and a gas barrier layer that is provided on at least one side of the base layer,the base layer including a resin having a glass transition temperature (Tg) of more than 130°

  • C.,the gas barrier layer being formed of a material that includes at least an oxygen atom and a silicon atom, a surface layer part of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0 to 10%, and a silicon atom content rate of 25 to 35%, based on a total content rate of oxygen atoms, nitrogen atoms, and silicon atoms, and the surface layer part of the gas barrier layer having a film density of 2.4 to 4.0 g/cm3.

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