Method and apparatus to scribe a line in a thin film material using a burst of laser pulses with beneficial pulse shape

• US 8,847,112 B2
• Filed: 09/24/2010
• Issued: 09/30/2014
• Est. Priority Date: 09/24/2009
• Status: Expired due to Fees

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: ESI-Pyrophotonics Lasers, Inc. (MKS Instruments Incorporated)
• Inventors: Panarello, Tullio, Rekow, Matthew, Murison, Richard
• Primary Examiner(s): Evans, Geoffrey S
• Application Number:
  US12/889,435
• Publication Number:
  US 20110233177A1
• Time in Patent Office: 1,467 Days
• Field of Search: 219/121.68, 219/121.69, 219/121.61, 219/121.72, 219/121.8
• US Class Current: 219/121.69
• CPC Class Codes: B23K 2103/42 Plastics B23K2103/16 takes precedence
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/0622 by shaping pulses
• CPC Class Codes: B23K 26/364 for making a groove or trench, e.g. for scribing a break initiation groove
• CPC Class Codes: B23K 26/40 taking account of the properties of the material involved

Abstract

A series of laser pulses in a pulse train, each pulse with a beneficial temporal power shape instead of the conventional laser temporal power shape, scribes a line in a thin film of material on a substrate. The beneficial temporal pulse shape has a spike/plateau chair shape or a square pulse shape. Scribing a line in the thin film is achieved by placing the series of laser pulse spots on the line to be scribed such that there is an overlapping area between adjacent laser pulse spots along the line. The use of a series of laser pulses with beneficial pulse shape to scribe a line in the thin film results in a better quality and cleaner scribing process compared to that achieved with the conventional pulse shape.

Claims

1. A laser-based processing method, comprising:

providing a series of laser pulses characterized by a first pulse and at least 9 following pulses, where each laser pulse in the series is characterized by a spike/plateau chair laser pulse shape, and each pulse in the series is further characterized by a laser spot with a laser spot area; and

removing a thin film of material, deposited on a substrate, along a pattern down to the substrate by;

placing the laser spot of the first pulse through the substrate at a spot position on said thin film of material; and

placing the laser spots of each of the following pulses in the series of pulses through the substrate at spot positions along said pattern on said thin film of material such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an area of each spot overlaps in some amount an area of each previous spot, wherein said laser pulse shape is configured such that no micro-cracks are formed in edges of the pattern in the thin film material.

2. The method of claim 1 wherein the pattern is a line.

3. The method of claim 1 wherein the pattern is a curve.

4. The method of claim 1 wherein the areas of two adjacent spots overlap more than 10% but less than 95%.

5. The method of claim 1 wherein the laser spot area is more than 0.0000001 Square centimeters but less than 0.0001 square centimeters.

6. The method of claim 1 wherein the thin film of material is zinc oxide.

7. The method of claim 1 wherein the thin film of material is a transparent conducting oxide.

8. The method of claim 1 wherein the thin film of material is selected from the group consisting of amorphous silicon, cadmium telluride, copper indium diselenide, copper indium gallium diselenide, and molybdenum.

9. The method of claim 1 wherein the laser pulse shape comprises a pulse with pulse length FWHM of more than 1 ns but less than 200 ns.

10. The method of claim 9 wherein the laser pulse shape has a rising edge risetime and a falling edge falltime such that the rising edge risetime is less than 10% of the pulse length.

11. The method of claim 10 wherein the laser pulse shape has a falling edge falltime such that the falling edge falltime is less than 30% of the pulse length.

12. A laser-based processing method comprising:

providing a series of laser pulses characterized by a first pulse and at least 9 following pulses, where each laser pulse in the series is characterized by a spike/plateau chair laser pulse shape, and each pulse in the series is further characterized by a laser spot with a laser spot area; and

removing a thin film of material, deposited on a substrate, along a pattern down to the substrate by;

placing the laser spot of the first pulse through the substrate at a spot position on said thin film of material; and

placing the laser spots of each of the following pulses in the series of pulses through the substrate at spot positions along said pattern on said thin film such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an area of each spot overlaps in some amount an area of each previous spot, wherein said laser pulse shape is configured such that no micro-cracks are formed in the substrate and no micro-cracks are formed on the edges of the pattern in the thin film of material.

13. The method of claim 12 wherein the pattern is a line.

14. The method of claim 12 wherein the pattern is a curve.

15. The method of claim 12 wherein the amount of spot overlap of the laser spot area of a following pulse with the laser spot area of a previous pulse is more than 10% but less than 95%.

16. The method of claim 12 wherein the laser spot area is more than 0.0000001 Square centimeters but less than 0.0001 square centimeters.

17. The method of claim 12 wherein the thin film of material is zinc oxide.

18. The method of claim 12 wherein the thin film of material is transparent conducting oxide.

19. The method of claim 12 wherein the thin film of material is chosen from among amorphous silicon, cadmium telluride, copper indium diselenide, copper indium gallium diselenide, and molybdenum.

20. The method of claim 12 wherein the laser pulse shape comprises a pulse with pulse length FWHM of more than 1 ns but less than 200 ns.

21. The method of claim 20 wherein the laser pulse shape has a rising edge, a falling edge, and an average power and is further characterized by a power spike having a spike duration that is substantially shorter than the pulse length and a peak power that is greater than the average power of the laser pulse.

22. The method of claim 21 wherein the laser pulse shape has a power spike of length FWHM of more than 0.3 ns and less than 30% of the pulse length.

23. The method of claim 21 wherein the laser pulse shape has a power spike with risetime more than 0.1 ns and less than 30% of the power spike length FWHM.

24. The method of claim 21 wherein the ratio of the peak power of the power spike to the average power of the laser pulse is greater than 1.5.