Method for axial alignment of charged particle beam and charged particle beam system

• US 8,847,172 B2
• Filed: 11/16/2011
• Issued: 09/30/2014
• Est. Priority Date: 11/16/2010
• Status: Active Grant

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Sawada, Hidetaka, Sasaki, Takeo
• Primary Examiner(s): MASKELL, MICHAEL P
• Application Number:
  US13/297,628
• Publication Number:
  US 20120119107A1
• Time in Patent Office: 1,049 Days
• Field of Search: 250/306, 250/307, 250/310, 250/311, 250/396.R, 250/396.ML
• US Class Current: 250/396.R
• CPC Class Codes: H01J 2237/103 characterised by lens type
• CPC Class Codes: H01J 2237/1501 Beam alignment means or procedures
• CPC Class Codes: H01J 2237/1532 Astigmatism
• CPC Class Codes: H01J 2237/262 Non-scanning techniques
• CPC Class Codes: H01J 37/1471 for centering, aligning or positioning of ray or beam
• CPC Class Codes: H01J 37/153 Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes

Abstract

A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel.

Claims

1. A method of making axial alignment of a charged particle beam in a charged particle beam system, said method comprising the steps of:

producing at least three astigmatic fields; and

translating parts of the orbit of the charged particle beam simultaneously along a direction perpendicular to an optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel out each other by deflectors mounted between said astigmatic fields.

2. A method of making axial alignment of a charged particle beam as set forth in claim 1, wherein each of said astigmatic fields is a three-fold astigmatic field, and wherein each of said astigmatisms is a two-fold or five-fold astigmatism.

3. A method of making axial alignment of a charged particle beam as set forth in claim 2, wherein each of said astigmatic fields is the two-fold astigmatic field, and wherein the translating step is terminated when the charged particle beam exiting from the astigmatic field distributed on the most downstream side of the at least three astigmatic fields is most overfocused.

4. A charged particle beam system comprising:

at least three stages of multipole elements for producing astigmatic fields; and

deflectors mounted between the multipole elements and operating to translate parts of the orbit of a charged particle beam simultaneously along a direction perpendicular to an optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the multipole elements cancel out each other.

5. A charged particle beam system as set forth in claim 4, further comprising pairs of transfer lenses mounted between the multipole elements, and wherein each pair of transfer lenses produces a pair of rotationally symmetric fields to transfer planes equivalent to planes formed by the multipole elements to their downstream multipole elements.

6. A charged particle beam system as set forth in any one of claims 4 and 5, wherein each of said astigmatic fields is a three-fold astigmatic field, and wherein each of said astigmatisms is a two-fold or five-fold astigmatism.

7. A charged particle beam system as set forth in claim 6, wherein each of said astigmatic fields is the two-fold astigmatic field, and wherein said deflectors terminate the simultaneous translational motions when the charged particle beam exiting from the multipole element located on the most downstream side of the at least three stages of multipole elements is most overfocused.