Sapphire substrate having triangular projections with bottom sides formed of outwardly curved lines
First Claim
1. A sapphire substrate having a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device, the sapphire substrate comprising a plurality of projections on the principal surface,wherein each of the projections has a bottom that has a substantially triangular shape with three vertexes,wherein each side of the bottom of the projections has a depression in its center, andwherein each side of the bottom of the projections is composed of two outwardly curved lines extending from a deepest point of the depression to two respective vertexes of the projections, each outwardly curved line having a convex portion.
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Abstract
A sapphire substrate having a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device comprises a plurality of projections on the principal surface. Each of the projections has a bottom that has a substantially polygonal shape. Each side of the bottom of the projections has a depression in its center. Vertexes of the bottoms of the respective projections extend in a direction that is within a range of ±10 degrees of a direction that is rotated counter-clockwise by 30 degrees from a crystal axis “a” of the sapphire substrate.
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Citations
15 Claims
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1. A sapphire substrate having a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device, the sapphire substrate comprising a plurality of projections on the principal surface,
wherein each of the projections has a bottom that has a substantially triangular shape with three vertexes, wherein each side of the bottom of the projections has a depression in its center, and wherein each side of the bottom of the projections is composed of two outwardly curved lines extending from a deepest point of the depression to two respective vertexes of the projections, each outwardly curved line having a convex portion.
Specification