Method, apparatus and system of parallel IC test

• US 8,847,615 B2
• Filed: 03/19/2010
• Issued: 09/30/2014
• Est. Priority Date: 03/20/2009
• Status: Active Grant

• Current Assignee: Shanghai Xin Hao Micro Electronics Co., Ltd.
• Original Assignee: Shanghai Xin Hao Micro Electronics Co., Ltd.
• Inventors: Lin, Kenneth ChengHao, Geng, Hongxi, Ren, Haoqi, Zhang, Bingchun, Zhen, Changchun
• Primary Examiner(s): ISLA RODAS, RICHARD
• Application Number:
  US12/659,768
• Publication Number:
  US 20100237891A1
• Time in Patent Office: 1,656 Days
• Field of Search: 324/750.3
• US Class Current: 324/750.3
• CPC Class Codes: G01R 19/16566 Circuits and arrangements for comparing voltage or current with one or several thresholds and for indicating the result not covered by subgroups G01R19/16504, G01R19/16528, G01R19/16533
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/3025 Wireless interface with the DUT

Abstract

A method, apparatus and system for integrated circuit testing, wherein a plural number of devices under test (DUTs) and a plural number of comparison apparatuses are placed on a common substrate. The DUTs all operate under the same input stimulation and each produce its own operation output. The outputs are compared by the comparison apparatuses to generate comparison characteristics which are used to filter-out the failed devices. This invention lowers the testing cost, shortens time to product mass-production, and lowers the miss rate of failed devices passed as good ones.

Claims

1. A method for testing a plurality of identical function microelectronic circuits on a common substrate, the method comprising:

delivering a testing stimulation signal to a plurality of identical function devices under test (DUTs) in parallel on the common substrate through input paths on the common substrate;

comparing outputs of the DUTs using a plurality of comparators on the common substrate; and

testing input paths connected to the DUTs and output paths connected to the comparators, wherein said testing comprises;

delivering a testing stimulation signal to the input paths;

comparing an output of the DUTs with the input testing simulation signal;

if the output matches the input, determining that the input paths and the output paths pass the test; and

if the output does not match the input, determining that the input paths and the output paths fail the test.

2. The method of claim 1, wherein the DUTs receive the same testing stimulation.

3. The method of claim 1 further comprising determining whether a DUT fails according to a comparison output and determining a location of a failed DUT.

4. The method of claim 1, wherein the testing stimulation signal is delivered through electromagnetic waves.

5. The method of claim 1 further comprising delivering power to the DUTs through wire.

6. The method of claim 1 further comprising delivering power to the DUTs through electromagnetic waves.

7. A semiconductor wafer comprising:

a plurality of identical function dice under test (DUTs); and

a plurality of comparators each placed between the dice on the wafer,

wherein each comparator includes at least two inputs, one connected to an output of one DUT, and the other connected to an output of another DUT.

8. A semiconductor wafer comprising:

a plurality of identical function dice under test (DUTs); and

a plurality of comparators each placed between the dice on the wafer,

wherein the comparators are configured to compare output of a DUT with output of another DUT.

9. The semiconductor wafer of claim 8 further comprising a plurality of register circuits connected to the comparators.

10. The semiconductor wafer of claim 8, wherein the comparators are further configured to compare output of a DUT with a predetermined value.

11. The semiconductor wafer of claim 8 further comprising input paths connected to input of the plurality of dice.

12. The semiconductor wafer of claim 11, wherein the input paths are connected to the comparators.

13. The semiconductor wafer of claim 11, wherein the input paths include fixed wire or configurable switches, or a combination of fixed wire and configurable switches.

14. The semiconductor wafer of claim 8, wherein the comparators are positioned on scribe lines on the wafer, along which the wafer is to be cut to produce individual chips.

15. The semiconductor wafer of claim 8 further comprising output paths connected to the comparators.

16. The semiconductor wafer of claim 15, wherein the output paths include configurable switches.

17. The semiconductor wafer of claim 8 further comprising a test stimulation signal generator on the wafer.

18. The semiconductor wafer of claim 8 further comprising a compression circuit connected to the comparators.

19. A semiconductor wafer comprising:

a plurality of identical function dice under test (DUTs);

a plurality of comparators each placed between the dice on the wafer;

output paths connected to the comparators, wherein the output paths include configurable switches.

20. The semiconductor wafer of claim 19 further comprising a plurality of register circuits connected to the comparators.

21. The semiconductor wafer of claim 19, wherein each comparator includes at least two inputs, one connected to an output of one DUT, and the other connected to an output of another DUT.

22. The semiconductor wafer of claim 19, wherein the comparators are positioned on scribe lines on the wafer, along which the wafer is to be cut to produce individual chips.

23. The semiconductor wafer of claim 19 further comprising a test stimulation signal generator on the wafer.

24. The semiconductor wafer of claim 19 further comprising a compression circuit connected to the comparators.