Multi-surface scattered radiation differentiation

• US 8,848,181 B1
• Filed: 04/12/2013
• Issued: 09/30/2014
• Est. Priority Date: 04/12/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: Zeta Instruments, Inc. (KLA Corporation)
• Inventors: Meeks, Steven W., Kudinar, Rusmin, Nguyen, Hung P.
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): RAHMAN, MD M
• Application Number:
  US13/861,383
• Publication Number:
  US 20140307255A1
• Time in Patent Office: 536 Days
• Field of Search: 356/239.7
• US Class Current: 356/239.7
• CPC Class Codes: G01N 2021/8967 Discriminating defects on opposite sides or at different depths of sheet or rod
• CPC Class Codes: G01N 21/896 Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod for other objects G01N21/958
• CPC Class Codes: G01N 21/958 Inspecting transparent materials or objects, e.g. windscreens for conveyed flat sheet or rod G01N21/896

Abstract

An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.

Claims

1. An apparatus, comprising:

a time varying beam reflector;

a radiating source that irradiates the time varying beam reflector at a first position;

a first waveplate, wherein the first waveplate is positioned along a source radiation path between the radiating source and the time varying beam reflector;

a telecentric scan lens that directs source radiation reflected by the time varying beam reflector onto a transparent sample and a stage, wherein the telecentric scan lens directs specular reflected radiation from the transparent sample to the time varying beam reflector at a second position symmetrically opposite the first position about a central axis of the telecentric scan lens, and wherein the irradiation of the transparent sample and the stage causes scattered radiation reflecting from the transparent sample and the stage;

a beam splitter that receives specular reflected radiation from the time varying beam reflector;

a second waveplate, wherein the second waveplate is positioned along a reflected radiation path between the time varying beam reflector and the beam splitter;

a first detector that receives a first portion of the specular reflected radiation from the beam splitter;

a focusing lens that receives the scattered radiation from the transparent sample;

a blocker that redirects the scattered radiation from the stage away from the focusing lens, wherein the blocker is located between the focusing lens and an irradiated location on the stage; and

a second detector located near the focal plane of the focusing lens, wherein a first surface of the transparent sample faces the telecentric scan lens, and wherein a second surface of the transparent sample does not face the telecentric scan lens.

2. The apparatus of claim 1, wherein the specular reflected radiation

includes:

(i) reflected radiation from a first surface of the transparent sample, and (ii) reflected radiation from a second surface of the transparent sample, wherein the polarizing beam splitter redirects a majority of the reflected radiation from the first surface of the transparent sample, and wherein the polarizing beam splitter does not redirect a majority of the reflected radiation from the second surface of the transparent sample.

3. The apparatus of claim 1, further comprising:

a processor; and

a memory, wherein the processor receives information from the first and second detectors and stores associated data in the memory.

4. The apparatus of claim 1, further comprising:

a processor that processes information received from the first and second detectors to determine the surface of the transparent sample from which the scattered radiation originated.

5. The apparatus of claim 1, wherein the first detector is a photodiode bi-cell device, and wherein the second detector is a photomultiplier tube.

6. The apparatus of claim 1, wherein the time varying beam reflector is a rotating polygon, wherein the radiating source is a laser, and wherein the beam splitter is a polarizing beam splitter.

7. The apparatus of claim 1, wherein the first waveplate circularly polarizes the source radiation before the transparent sample is irradiated, and wherein the second waveplate linearly polarizes the specular reflected radiation from the transparent sample.

8. The apparatus of claim 1, wherein the specular reflected radiation that is reflected from the first surface of the transparent sample is shifted in phase by approximately pi radians,

wherein the reflected radiation that is reflected from the second surface of the transparent sample is shifted in phase by approximately zero radians, wherein the second waveplate vertically polarizes the specular reflected radiation from the first surface of the transparent sample, wherein the second waveplate horizontally polarizes the specular reflected radiation from the second surface of the transparent sample, and wherein the beam splitter only reflects vertically polarized radiation.

9. A method, comprising:

(a) irradiating a transparent sample;

(b) measuring specular reflection from a first surface of the transparent sample;

(c) measuring scattered radiation from the transparent sample, wherein the measuring of (c) further comprises;

(d) blocking scattered radiation from a stage while not blocking scattered radiation from the transparent sample;

(e) focusing scattered radiation from the transparent sample to a focal plane of the focusing lens; and

(f) detecting intensity of the focused scattered radiation from the transparent sample; and

(g) determining a surface of the transparent sample from which the scattered radiation originated, wherein the determining of (g) further comprises;

(h) determining if the measured scattered radiation from the transparent sample is greater than a first threshold value; and

(i) determining if the specular reflection from a first surface of the transparent sample is less than a second threshold value, wherein the first surface of the transparent sample is irradiated before a second surface of the transparent sample.

10. The method of claim 9, wherein the irradiating of (a) further comprises:

(a1) irradiating a first position on a time varying beam reflector with a source radiation beam; and

(a2) directing the source radiation beam from the time varying beam reflector to a telecentric scan lens, thereby directing a scanning beam onto the transparent sample and a stage.

11. The method of claim 10, wherein the irradiating of (a1) is performed by a laser, and wherein the time varying beam reflector is a rotating polygon.

12. The method of claim 9, wherein the measuring of (b) further comprises:

(b1) directing reflected radiation onto the time varying beam reflector to produce a stationary reflected beam; and

(b2) directing a first portion of the stationary reflected beam onto a first detector.

13. The method of claim 12, wherein the directing of (b1) is performed by a telecentric scan lens, and wherein the directing of (b2) is performed by a polarizing beam splitter.

14. The method of claim 9, wherein the blocking of (c1) is performed by a blocker, wherein the focusing of (e) is performed by a focusing lens, and wherein the detecting of (f) is performed by a photomultiplier tube.

15. The method of claim 9, wherein the determining of (h) and (i) are performed by a processor, wherein the processor communicates with a memory containing information representing the measured scattered radiation, the measured specular reflection, the first threshold value, and the second threshold value.

16. The method of claim 9, wherein the measured scattered radiation from the transparent sample is greater than a first threshold value, wherein the specular reflection from a first surface of the transparent sample is less than a second threshold value, and wherein the surface of the transparent sample from which the scattered radiation originated is the top surface of the transparent sample.

17. The method of claim 9, wherein the measured scattered radiation from the transparent sample is greater than a first threshold value, wherein the specular reflection from a first surface of the transparent sample is greater than or equal to a second threshold value, and wherein the surface of the transparent sample from which the scattered radiation originated is the bottom surface of the transparent sample.

18. An apparatus, comprising:

a time varying beam reflector;

a radiating source that irradiates the time varying beam reflector at a first position;

a telecentric scan lens that directs source radiation reflected by the time varying beam reflector onto a transparent sample and a stage, wherein the telecentric scan lens directs specular reflected radiation from the transparent sample to the time varying beam reflector at a second position symmetrically opposite the first position about a central axis of the telecentric scan lens, and wherein the irradiation of the transparent sample and the stage causes scattered radiation reflecting from the transparent sample and the stage; and

means for measuring specular reflection from a first surface of a transparent sample, for blocking scattered radiation from the stage while not blocking scattered radiation from the transparent sample for measuring scattered radiation from the transparent sample, and for determining the surface of the transparent sample from which the scattered radiation originated.

19. The apparatus of claim 18, wherein the means include a first detector, a second detector, a first waveplate, a second waveplate, a blocker, and a polarizing beam splitter.