Integrated plasmonic nanocavity sensing device
First Claim
1. An integrated plasmonic sensing device comprising:
- a plasmonic waveguide disposed on a substrate, said plasmonic waveguide comprising a first conductive layer and a second conductive layer and a dielectric layer between said first and second conductive layer, wherein at least part of said dielectric layer is configured as an optical source for exciting surface plasmon modes supported by said waveguide;
at least one nanocavity extending through said first and second conductive layers and said dielectric layer, wherein said waveguide is configured to couple said surface plasmon modes to said nanocavity for activating one or more localized plasmon resonances in said nanocavity; and
,at least one optical detector comprising at least one detection region formed on or in said substrate in the vicinity of said nanocavity, wherein said optical detector is configured to sense said one or more localized plasmon resonances in said nanocavity.
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Abstract
An integrated plasmonic sensing device is described wherein the integrated device comprises: at least one optical source comprising a first conductive layer and a second conductive layer, and a optical active layer between at least part of said first and second conductive layers; at least one nanocavity extending through said first and second conductive layers and said optical active layer, wherein said optical source is configured to generate surface plasmon modes suitable for optically activating one or more resonances in said nanocavity; and, at least one optical detector comprising at least one detection region formed in said substrate in the vicinity of said nanocavity resonator, wherein said optical detector is configured to sense optically activated resonances in said nanocavity.
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Citations
16 Claims
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1. An integrated plasmonic sensing device comprising:
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a plasmonic waveguide disposed on a substrate, said plasmonic waveguide comprising a first conductive layer and a second conductive layer and a dielectric layer between said first and second conductive layer, wherein at least part of said dielectric layer is configured as an optical source for exciting surface plasmon modes supported by said waveguide; at least one nanocavity extending through said first and second conductive layers and said dielectric layer, wherein said waveguide is configured to couple said surface plasmon modes to said nanocavity for activating one or more localized plasmon resonances in said nanocavity; and
,at least one optical detector comprising at least one detection region formed on or in said substrate in the vicinity of said nanocavity, wherein said optical detector is configured to sense said one or more localized plasmon resonances in said nanocavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification