Electromechanic microsensor
First Claim
1. A micro-electro-mechanical (MEMS) sensor comprising drive elements configured to move linearly along an x-y plane, the drive elements are arranged on a substrate to determine at least two components of a yaw rate vector, wherein a first group of drive elements that is configured to move perpendicularly to each other is connected by a first coupling device that is rotatably arranged on the substrate to synchronize the perpendicular movement, and wherein a second group of drive elements that is configured to move parallel to each other is connected by a second coupling device that synchronizes the parallel movement.
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Abstract
The invention relates to an electromechanic microsensor (MEMS) comprising drive elements which are moved linearly in an x-y plane and disposed on a substrate to determine at least two, preferably three, components of the yaw rate vector of a substrate, wherein two groups of drive elements are driven in directions running essentially at right angles to each other. The MEMS according to the invention is characterized in that the drive elements, which are moved at right angles to each other, are connected to one another to synchronize the movements via a coupling device that is rotatably mounted on the substrate.
20 Citations
17 Claims
- 1. A micro-electro-mechanical (MEMS) sensor comprising drive elements configured to move linearly along an x-y plane, the drive elements are arranged on a substrate to determine at least two components of a yaw rate vector, wherein a first group of drive elements that is configured to move perpendicularly to each other is connected by a first coupling device that is rotatably arranged on the substrate to synchronize the perpendicular movement, and wherein a second group of drive elements that is configured to move parallel to each other is connected by a second coupling device that synchronizes the parallel movement.
Specification