Inertial sensor and method for manufacturing an inertial sensor
First Claim
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1. An inertial sensor, comprising:
- a substrate;
a mass element;
a detecting device configured to detect a movement of the mass element relative to the substrate; and
a spring device, the mass element being coupled to the substrate via the spring device,wherein the spring device has a T-shaped cross-sectional profile, wherein the mass element includes a recess in which the spring device is situated, and wherein the T-shaped cross-sectional profile has a first portion, closest to the substrate and parallel to the substrate, and a second portion extending from the first portion perpendicularly to the substrate.
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Abstract
An inertial sensor includes a substrate, a mass element, and a detecting device for detecting a movement of the mass element relative to the substrate, the mass element being coupled to the substrate with the aid of a spring device, wherein the spring device has a T-shaped cross-sectional profile. A method for manufacturing an inertial sensor is also disclosed.
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Citations
16 Claims
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1. An inertial sensor, comprising:
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a substrate; a mass element; a detecting device configured to detect a movement of the mass element relative to the substrate; and a spring device, the mass element being coupled to the substrate via the spring device, wherein the spring device has a T-shaped cross-sectional profile, wherein the mass element includes a recess in which the spring device is situated, and wherein the T-shaped cross-sectional profile has a first portion, closest to the substrate and parallel to the substrate, and a second portion extending from the first portion perpendicularly to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing an inertial sensor including a spring device having a T-shaped cross-sectional profile, the method comprising:
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providing a substrate, a detecting device being situated on the substrate; depositing a first layer onto the substrate; structuring the first layer; depositing an oxide layer onto the structured first layer; depositing a second layer onto the oxide layer; and structuring the second layer to form a web which is situated perpendicularly on the first layer. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification