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Inertial sensor and method for manufacturing an inertial sensor

  • US 8,850,890 B2
  • Filed: 08/03/2011
  • Issued: 10/07/2014
  • Est. Priority Date: 08/03/2010
  • Status: Active Grant
First Claim
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1. An inertial sensor, comprising:

  • a substrate;

    a mass element;

    a detecting device configured to detect a movement of the mass element relative to the substrate; and

    a spring device, the mass element being coupled to the substrate via the spring device,wherein the spring device has a T-shaped cross-sectional profile, wherein the mass element includes a recess in which the spring device is situated, and wherein the T-shaped cross-sectional profile has a first portion, closest to the substrate and parallel to the substrate, and a second portion extending from the first portion perpendicularly to the substrate.

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