Micromechanical component and manufacturing method for a micromechanical component

• US 8,850,891 B2
• Filed: 11/03/2011
• Issued: 10/07/2014
• Est. Priority Date: 01/05/2011
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Reinmuth, Jochen
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/288,750
• Publication Number:
  US 20120167681A1
• Time in Patent Office: 1,069 Days
• Field of Search: 735/143.2, 735/143.8, 735/143.6
• US Class Current: 73/514.32
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A micromechanical component having a fixing point and a seismic weight, which is connected to the fixing point by at least one spring and is made at least partially out of a first material, the first material being a semiconductor material, the seismic weight being additionally made out of at least one second material, and the second material having a higher density than the first material. In addition, a manufacturing method for a micromechanical component is provided, having the steps of forming a seismic weight at least partially out of a first material, the first material being a semiconductor material, connecting the seismic weight to a fixing point of the micromechanical component, using at least one spring, and forming the seismic weight from the first material and at least one second material, which has a higher density than the first material.

Claims

1. A micromechanical component, comprising:

a fixing point; and

a seismic weight surrounding the fixing point and connected to the fixing point by at least one spring, the seismic weight being made at least partially out of a first material, the first material being a semiconductor material, and being additionally made out of at least one second material, the second material having a higher density than the first material, wherein the second material and the first material are chemically bonded to one another.

2. The micromechanical component as recited in claim 1, wherein the second material includes at least one metal.

3. The micromechanical component as recited in claim 2, wherein the second material includes at least one of hafnium, tantalum, tungsten, rhenium, osmium, iridium, platinum, gold, and copper.

4. The micromechanical component as recited in claim 1, wherein the seismic weight includes at least a first partial weight made out of the first material and a second partial weight at least partially made out of the second material, and the second partial weight is connected to the first partial weight by at least one spring structure.

5. The micromechanical component as recited in claim 1, wherein the micromechanical component includes a substrate, and the seismic weight has an inner side oriented towards the substrate and an outer side oriented away from the substrate, and the seismic weight includes finger structures situated between the inner side and the outer side, the finger structures containing at least the second material, and longitudinal center axes of the finger structures being oriented parallelly to at least one of the inner side and to the outer side.

6. The micromechanical component as recited in claim 5, wherein heights of the finger structures extend from the inner side to the outer side.

7. The micromechanical component as recited in claim 5, wherein the finger structures are formed from the second material in such a manner that the first material is present in the finger structures as at most a residual element.

8. The micromechanical component as recited in claim 5, wherein a partial outer surface of the outer side is made of the first material.