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Micro-electromechanical system devices

  • US 8,853,803 B2
  • Filed: 08/10/2012
  • Issued: 10/07/2014
  • Est. Priority Date: 02/14/2011
  • Status: Active Grant
First Claim
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1. A micro-electromechanical system (MEMS) device, comprising:

  • a substrate;

    a first beam suspended relative to a surface of the substrate, the first beam comprising a first portion and a second portion that are separated by an isolation joint, the isolation joint comprising an insulative material, wherein the first and second portions each comprise a first semiconductor and a first dielectric layer;

    a second beam suspended relative to the surface of the substrate, the second beam comprising a second semiconductor and a second dielectric layer to promote curvature of the second beam; and

    a third beam suspended relative to the surface of the substrate, the third beam consisting essentially of a first material;

    wherein the second beam is configured to move relative to the third beam in response to an acceleration along an axis perpendicular to the surface of the substrate.

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