Tilting actuator with close-gap electrodes
First Claim
Patent Images
1. A tunable tilting device comprising:
- a tilting element and a suspension structure including at least one flexure coupled to the tilting element, said suspension structure having a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis, said suspension structure being responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, whereby the bending stiffness of the suspension structure is varied as a result of the response to the tuning force.
1 Assignment
0 Petitions
Accused Products
Abstract
A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.
-
Citations
13 Claims
-
1. A tunable tilting device comprising:
a tilting element and a suspension structure including at least one flexure coupled to the tilting element, said suspension structure having a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis, said suspension structure being responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, whereby the bending stiffness of the suspension structure is varied as a result of the response to the tuning force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
Specification