Scanned source oriented nanofiber formation

• US 8,858,815 B2
• Filed: 04/08/2013
• Issued: 10/14/2014
• Est. Priority Date: 09/26/2003
• Status: Expired due to Fees

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Craighead, Harold G., Kameoka, Jun
• Primary Examiner(s): CULBERT, ROBERTS P
• Application Number:
  US13/858,643
• Publication Number:
  US 20130327742A1
• Time in Patent Office: 554 Days
• Field of Search: 216/41, 216/42, 977/856, 977/888
• US Class Current: 216/41
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C23F 17/00 Multi-step processes for surface treatment of metallic material involving at least one process provided for in class C23 and at least one process covered by subclass C21D or C22F or class C25 coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups C23C2/00 - C23C26/00, or by combinations of methods providedfor in subclasses C23C and C25D, C23C28/00
• CPC Class Codes: D01D 5/0069 characterised by the spinning section, e.g. capillary tube, protrusion or pin
• CPC Class Codes: D01F 6/64 from polycarbonates
• CPC Class Codes: D01F 6/66 from polyethers
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10T 428/24562 Interlaminar spaces

Abstract

Nanofibers are formed using electrospray deposition from microfluidic source. The source is brought close to a surface, and scanned in one embodiment to form oriented or patterned fibers. In one embodiment, the surface has features, such as trenches on a silicon wafer. In further embodiments, the surface is rotated to form patterned nanofibers, such as polymer nanofibers. The nanofibers may be used as a mask to create features, and as a sacrificial layer to create nanochannels.

Claims

1. A method comprising:

depositing a depolymerizable nanofiber on a substrate;

covering the nanofiber with a capping layer; and

removing the nanofiber to create a nanochannel.

2. A method comprising:

depositing a depolymerizable nanofiber on a substrate;

covering the nanofiber with a capping layer; and

removing the nanofiber to create a nanochannel, wherein the nanofiber is removed by;

creating openings in the capping layer on either side of a portion of the nanofiber; and

depolymerizing the nanofiber.

3. The method of claim 2 wherein the nanochannel is substantially elliptical in cross section.

4. A method comprising:

electrospraying a depolymerizable nanofiber on a substrate;

covering the nanofiber with a capping layer; and

removing the nanofiber to create a nanochannel.

5. The method of claim 4 wherein the nanofiber is removed by:

creating openings in the capping layer on either side of a portion of the nanofiber; and

depolymerizing the nanofiber.

6. The method of claim 5 wherein the nanochannel is substantially elliptical in cross section.