Method for manufacturing semiconductor device

• US 8,859,330 B2
• Filed: 03/14/2012
• Issued: 10/14/2014
• Est. Priority Date: 03/23/2011
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Koezuka, Junichi, Ohno, Shinji, Sato, Yuichi
• Primary Examiner(s): Garber, Charles
• Assistant Examiner(s): Seven, Evren
• Application Number:
  US13/419,468
• Publication Number:
  US 20120244658A1
• Time in Patent Office: 944 Days
• Field of Search: 438510-541, 438/608, 438/609
• US Class Current: 438/104
• CPC Class Codes: H01L 21/425 producing ion implantation
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A semiconductor device including an oxide semiconductor, which has stable electric characteristics and high reliability, is provided. In a method for manufacturing a transistor including an oxide semiconductor film, an implantation step where rare gas ions are implanted to the oxide semiconductor film is performed, and the oxide semiconductor film to which rare gas ions are implanted is subjected to a heating step under reduced pressure, in a nitrogen atmosphere, or in a rare gas atmosphere, whereby hydrogen or water contained in the oxide semiconductor film to which rare gas ions are implanted is released; thus, the oxide semiconductor film is highly purified.

Claims

1. A method for manufacturing a semiconductor device, comprising the steps of:

forming an oxide semiconductor film;

forming a void into the oxide semiconductor film by an implantation step for implanting a noble gas ion inside the oxide semiconductor film;

exposing the oxide semiconductor film after the implantation step; and

performing a heating step under reduced pressure, in a nitrogen atmosphere, or in a noble gas atmosphere on the exposed oxide semiconductor film, so that hydrogen or water contained in the oxide semiconductor film is released through the void,

wherein a peak of a concentration of an implanted noble gas element in the oxide semiconductor film is greater than or equal to 1×

10¹⁹ atoms/cm³ and less than or equal to 3×

10²² atoms/cm³ in the implantation step,

wherein an ion implantation method, an ion doping method, or a plasma immersion ion implantation method is used for the implantation step, and

wherein the oxide semiconductor film to which the noble gas ion is implanted is a channel formation region of a transistor.

2. The method for manufacturing a semiconductor device, according to claim 1, further comprising the step of:

supplying oxygen to the oxide semiconductor film subjected to the heating step.

3. The method for manufacturing a semiconductor device, according to claim 1, wherein at least argon, krypton, or xenon is used as the noble gas element.

4. The method for manufacturing a semiconductor device, according to claim 1, wherein a temperature of the heating step is higher than or equal to 300°

C. and lower than or equal to 700°

C.

5. The method for manufacturing a semiconductor device, according to claim 1, wherein the oxide semiconductor film subjected to the heating step is amorphous.

6. The method for manufacturing a semiconductor device, according to claim 1, wherein the oxide semiconductor film subjected to the heating step includes a crystal portion.

7. A method for manufacturing a semiconductor device, comprising the steps of:

forming an oxide semiconductor film;

forming a void into the oxide semiconductor film by an implantation step for implanting a noble gas ion inside the oxide semiconductor film;

exposing the oxide semiconductor film after the implantation step;

performing a heating step under reduced pressure, in a nitrogen atmosphere, or in a noble gas atmosphere on the exposed oxide semiconductor film, so that hydrogen or water contained in the oxide semiconductor film is released through the void; and

forming an insulating layer over the oxide semiconductor film subjected to the heating step,

wherein a peak of a concentration of an implanted noble gas element in the oxide semiconductor film is greater than or equal to 1×

10¹⁹ atoms/cm³ and less than or equal to 3×

10²² atoms/cm³ in the implantation step,

wherein an ion implantation method, an ion doping method, or a plasma immersion ion implantation method is used for the implantation step, and

wherein the oxide semiconductor film to which the noble gas ion is implanted is a channel formation region of a transistor.

8. The method for manufacturing a semiconductor device, according to claim 7, further comprising the steps of:

forming an oxide insulating layer as the insulating layer; and

heating the oxide semiconductor film subjected to the heating step with at least part of the oxide insulating layer being in contact with the oxide semiconductor film.

9. The method for manufacturing a semiconductor device, according to claim 7, further comprising the step of:

supplying oxygen to the oxide semiconductor film subjected to the heating step.

10. The method for manufacturing a semiconductor device, according to claim 7, wherein at least argon, krypton, or xenon is used as the noble gas element.

11. The method for manufacturing a semiconductor device, according to claim 7, wherein a temperature of the heating step is higher than or equal to 300°

C. and lower than or equal to 700°

C.

12. The method for manufacturing a semiconductor device, according to claim 7, wherein the oxide semiconductor film subjected to the heating step is amorphous.

13. The method for manufacturing a semiconductor device, according to claim 7, wherein the oxide semiconductor film subjected to the heating step includes a crystal portion.

14. A method for manufacturing a semiconductor device, comprising the steps of:

forming an oxide semiconductor film;

forming an insulating film over the oxide semiconductor film;

forming a void into the oxide semiconductor film by an implantation step for implanting a noble gas ion inside the oxide semiconductor film through the insulating film;

removing the insulating film so that the oxide semiconductor film is exposed after the implantation step; and

performing a heating step under reduced pressure, in a nitrogen atmosphere, or in a noble gas atmosphere on the exposed oxide semiconductor film, so that hydrogen or water contained in the oxide semiconductor film is released through the void,

wherein a peak of a concentration of an implanted noble gas element in the oxide semiconductor film is greater than or equal to 1×

10¹⁹ atoms/cm³ and less than or equal to 3×

10²² atoms/cm³ in the implantation step, and

wherein an ion implantation method, an ion doping method, or a plasma immersion ion implantation method is used for the implantation step, and

wherein the oxide semiconductor film to which the noble gas ion is implanted is a channel formation region of a transistor.

15. The method for manufacturing a semiconductor device, according to claim 14, further comprising the step of:

supplying oxygen to the oxide semiconductor film subjected to the heating step.

16. The method for manufacturing a semiconductor device, according to claim 14, wherein at least argon, krypton, or xenon is used as the noble gas element.

17. The method for manufacturing a semiconductor device, according to claim 14, wherein a temperature of the heating step is higher than or equal to 300°

C. and lower than or equal to 700°

C.

18. The method for manufacturing a semiconductor device, according to claim 14, wherein the oxide semiconductor film subjected to the heating step is amorphous.

19. The method for manufacturing a semiconductor device, according to claim 14, wherein the oxide semiconductor film subjected to the heating step includes a crystal portion.

20. A method for manufacturing a semiconductor device, comprising the steps of:

forming an oxide semiconductor film;

forming an insulating film over the oxide semiconductor film;

forming a void into the oxide semiconductor film by an implantation step for implanting a noble gas ion inside the oxide semiconductor film through the insulating film;

removing the insulating film so that the oxide semiconductor film is exposed after the implantation step;

performing a heating step under reduced pressure, in a nitrogen atmosphere, or in a noble gas atmosphere on the exposed oxide semiconductor film, so that hydrogen or water contained in the oxide semiconductor film is released through the void; and

forming an insulating layer in contact with at least part of the oxide semiconductor film subjected to the heating step,

wherein a peak of a concentration of an implanted noble gas element in the oxide semiconductor film is greater than or equal to 1×

10¹⁹ atoms/cm³ and less than or equal to 3×

10²² atoms/cm³ in the implantation step,

wherein an ion implantation method, an ion doping method, or a plasma immersion ion implantation method is used for the implantation step, and

wherein the oxide semiconductor film to which the noble gas ion is implanted is a channel formation region of a transistor.

21. The method for manufacturing a semiconductor device, according to claim 20, further comprising the steps of:

forming an oxide insulating layer as the insulating layer; and

heating the oxide semiconductor film subjected to the heating step with at least part of the oxide insulating layer being in contact with the oxide semiconductor film.

22. The method for manufacturing a semiconductor device, according to claim 20, further comprising the step of:

supplying oxygen to the oxide semiconductor film subjected to the heating step.

23. The method for manufacturing a semiconductor device, according to claim 20, wherein at least argon, krypton, or xenon is used as the noble gas element.

24. The method for manufacturing a semiconductor device, according to claim 20, wherein a temperature of the heating step is higher than or equal to 300°

C. and lower than or equal to 700°

C.

25. The method for manufacturing a semiconductor device, according to claim 20, wherein the oxide semiconductor film subjected to the heating step is amorphous.

26. The method for manufacturing a semiconductor device, according to claim 20, wherein the oxide semiconductor film subjected to the heating step includes a crystal portion.