Readout system for MEMS-based capacitive accelerometers and strain sensors, and method for reading

• US 8,860,437 B2
• Filed: 09/06/2011
• Issued: 10/14/2014
• Est. Priority Date: 09/13/2010
• Status: Active Grant

• Current Assignee: Stichting Imec Nederland
• Original Assignee: Stichting Imec Nederland
• Inventors: Santana, Juan, van Liempd, Christinus Antonetta Paulus, van den Hoven, Richard
• Primary Examiner(s): Koval, Melissa
• Assistant Examiner(s): MILLER, DANIEL R
• Application Number:
  US13/226,153
• Publication Number:
  US 20120062244A1
• Time in Patent Office: 1,134 Days
• Field of Search: 178/18.06, 178/19.03, 324658-690, 341/33, 345/173, 345/174
• US Class Current: 324/658
• CPC Class Codes: G01D 5/24 by varying capacitance
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A method and an electronic readout circuit for measuring a capacitance of a MEMS sensor are disclosed. In one aspect, the readout circuit includes: an input stage for receiving a first signal from the sensor and for presenting a second signal; a charge amplifier stage for amplifying and integrating the second signal; and a control logic for controlling the readout circuit according to a predefined timing relation synchronized to actuation voltages applied to the sensor for generating the first signal. The readout circuit may further includes a first switching unit for applying a first reference voltage to the sensor and a second switching unit for applying the second signal to the charge amplifier stage, wherein the first and the second switching units are controlled according to the predefined timing relation such that a plurality of the second signals are accumulated.

Claims

1. An electronic readout-circuit for measuring a capacitance value of a microelectromechanical systems (MEMS) sensor and for generating an output signal indicative of the measured capacitance value, the readout-circuit comprising:

an input stage having an input port configured to receive a first signal from the MEMS sensor, the first signal being indicative of the capacitance value, and an output port configured to produce a second signal derived from the first signal;

a charge amplifier stage configured to receive the second signal from the output port of the input stage, the charge amplifier stage having components for amplifying and integrating the second signal, and an output configured to send the amplified and integrated second signal as the output signal;

a control logic configured to control the operation of the readout-circuit according to a predefined timing relation synchronized to a first and a second actuation voltage, the first and second actuation voltages being applied to the MEMS sensor for generating the first signal on an output of the MEMS sensor;

a first switching unit connected between the input port of the input stage and a first reference voltage source and configured to apply a first reference voltage to the MEMS sensor;

a second switching unit connected between the input port and the output port of the input stage and configured to apply the second signal to a first input of the charge amplifier stage, wherein the first and the second switching units are connected to the control logic for being controlled according to the predefined timing relation such that a plurality of the second signals are accumulated on the charge amplifier stage;

an input capacitor connected between the MEMS sensor and the second switching unit and configured to capacitively couple the output of the MEMS sensor to the first input of the charge amplifier stage while creating a DC-offset between the sensor and the charge amplifier stage;

a second reference voltage source connected to a second input of the charge amplifier stage; and

a third switching unit connected between the input capacitor and the second reference voltage source and configured to pre-charge the input capacitor for creating the DC-offset.

2. The electronic readout-circuit according to claim 1, wherein the first reference voltage source is also connected to a second input of the charge amplifier stage.

3. The electronic readout-circuit according to claim 1, wherein the first reference voltage is a voltage between ground and the second reference voltage.

4. The electronic readout-circuit according to claim 1, wherein the first and the second actuation voltages have the same polarity.

5. The electronic readout-circuit according to claim 1, wherein the first actuation voltage comprises a first clock signal, and the second actuation voltage comprises a second clock signal having a same frequency as the first clock signal, except being approximately 180°

phase shifted.

6. The electronic readout-circuit according to claim 1, wherein the first reference voltage is a DC voltage with an amplitude of about 30% to 70% of an amplitude of the first actuation voltage.

7. The electronic readout-circuit according to claim 1, wherein the first reference voltage is a DC voltage with an amplitude of about 40-60% of an amplitude of the first actuation voltage.

8. The electronic readout-circuit according to claim 1, wherein the first reference voltage is a DC voltage with an amplitude of about 50% of an amplitude of the first actuation voltage.

9. The electronic readout-circuit according to claim 1, wherein the charge amplifier stage comprises:

an amplifier having a first input connected to the first input of the charge amplifier stage and being configured to receive the second signal, and a second input connected to the second input of the charge amplifier stage and configured to receive a reference voltage, and an amplifier output connected to the output of the charge amplifier stage and configured to provide the output signal;

an integrator capacitor connected between the first input of the amplifier and the amplifier output for integrating the second signal;

a reset switch configured to discharge the integrator capacitor; and

a band-limiting capacitor connected between the amplifier output and a reference voltage (GND) and configured to increase the stability of the readout-circuit.

10. The electronic readout-circuit according to claim 7, wherein the integrator capacitor comprises a switched capacitor array configured to provide gain control of the readout-circuit.

11. The electronic readout-circuit according to claim 1, further comprising a sample-and-hold stage connected to the output of the charge amplifier stage, the sample-and-hold stage having components for sampling and holding the output signal and for providing the sampled output signal as the output signal.

12. The electronic readout-circuit according to claim 11, further comprising the MEMS sensor.

13. The electronic readout-circuit according to claim 1, further comprising an analog-to-digital convertor configured to digitize the output signal.

14. An electronic device comprising the electronic readout-circuit according to claim 1.

15. An electronic device comprising a first and a second electronic readout-circuit according to claim 1, the device further comprising a multiplexer configured to alternately provide the output signal of the first and second electronic readout-circuit.

16. A method of measuring the capacitance value of a microelectromechanical systems (MEMS) sensor and for generating an output signal indicative of the measured capacitance value using a readout-circuit, the method comprising:

receiving a first signal from the MEMS sensor indicative of the capacitance value;

deriving from the first signal a second signal;

amplifying and integrating the second signal in a charge amplifier stage of the readout-circuit;

presenting the amplified and integrated second signal as the output signal;

controlling the readout-circuit according to a predefined timing relation synchronized to a first and a second actuation voltage which are applied to the MEMS sensor for generating the first signal on an output of the MEMS sensor;

controlling a first switching unit and a second switching unit of the readout-circuit according to the predefined timing relation such that a plurality of the second signals are integrated on the charge amplifier stage;

capacitively coupling the output of the MEMS sensor to a first input of the charge amplifier stage while creating a DC-offset between the MEMS sensor and the charge amplifier stage; and

pre-charging an input capacitor connected between the MEMS sensor and the second switching unit to create the DC-offset.

17. The method according to claim 16, wherein the first and the second actuation voltages have the same polarity.

18. The method according to claim 16, wherein the first actuation voltage comprises a first clock signal, and the second actuation voltage comprises a second clock signal having a same frequency as the first clock signal, except being approximately 180°

phase shifted.

19. A system for measuring the capacitance value of a microelectromechanical systems (MEMS) sensor and for generating an output signal indicative of the measured capacitance value using a readout-circuit, the system comprising:

means for receiving a first signal from the MEMS sensor indicative of the capacitance value;

means for deriving from the first signal a second signal;

means for amplifying and integrating the second signal in a charge amplifier stage of the readout-circuit;

means for presenting the amplified and integrated second signal as the output signal;

means for controlling the readout-circuit according to a predefined timing relation synchronized to a first and a second actuation voltage which are applied to the MEMS sensor for generating the first signal on an output of the MEMS sensor;

means for controlling a first and the second switching units of the readout-circuit according to the predefined timing relation such that a plurality of the second signals are integrated on the charge amplifier stage;

means for capacitively coupling the output of the MEMS sensor to a first input of the charge amplifier stage while creating a DC-offset between the MEMS sensor and the charge amplifier stage; and

means for pre-charging the capacitively coupling means to create the DC-offset.