MEMS microphone
First Claim
Patent Images
1. A MEMS microphone comprising:
- a) a case with a front side open to the exterior, the case comprising an interior volume, and a closed side;
b) a MEMS membrane mounted on one face of a base, the base being mounted inside the case on said closed side; and
c) a mesh covering the open front side, said front side covered by said mesh being substantially transparent acoustically to at least some of a range of operating frequencies at which the microphone is sensitive, the mesh being conductive and grounded;
wherein;
said range comprises ultrasound frequencies and defines a highest operating wavelength; and
said mesh includes perforations with a largest opening being less than half of said highest operating wavelength across.
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Accused Products
Abstract
A MEMS microphone comprising:
- a) a case with an open front side;
- b) a MEMS membrane mounted on one face of a base, the base being mounted inside the case on a substantially closed side; and
- c) a mesh covering the front side, substantially transparent acoustically to at least some of a range of operating frequencies at which the microphone is sensitive.
123 Citations
16 Claims
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1. A MEMS microphone comprising:
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a) a case with a front side open to the exterior, the case comprising an interior volume, and a closed side; b) a MEMS membrane mounted on one face of a base, the base being mounted inside the case on said closed side; and c) a mesh covering the open front side, said front side covered by said mesh being substantially transparent acoustically to at least some of a range of operating frequencies at which the microphone is sensitive, the mesh being conductive and grounded; wherein; said range comprises ultrasound frequencies and defines a highest operating wavelength; and said mesh includes perforations with a largest opening being less than half of said highest operating wavelength across. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification