Processing data managing system, processing system, and processing device data managing method

• US 8,862,259 B2
• Filed: 03/30/2007
• Issued: 10/14/2014
• Est. Priority Date: 03/31/2006
• Status: Active Grant

• Current Assignee: Hoya Corporation
• Original Assignee: Hoya Corporation
• Inventors: Kobayashi, Takumi
• Primary Examiner(s): DUNN, DARRIN D
• Application Number:
  US12/295,617
• Publication Number:
  US 20090287335A1
• Time in Patent Office: 2,755 Days
• Field of Search: 700/108, 700/121, 702/183, 702/185, 702/187, 204/193.12, 204/193.13, 204/298.03, 204/193.2
• US Class Current: 700/108
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G11B 5/85 Coating a support with a magnetic layer by vapour deposition
• CPC Class Codes: G11B 5/851 Coating a support with a magnetic layer by sputtering
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A processing data managing system includes: a processing device 11 (such as a sputtering device for manufacturing a magnetic disc) for repeating the same process for each cycle; a sampling unit 30 for collecting raw data on a processing condition in the processing device (such as a discharge condition); a calculation unit 100 for receiving the raw data, calculating the raw data according to a predetermined rule, and processing it as summary data expressing a characteristic point for each cycle (characteristic value: for example, average value, maximum value, minimum value, standard deviation, discharge time, and the like); a data storage unit 40 for storing the processed summary data in storage means; and a display/output unit 50 for chart-displaying the summary data stored in the storage means.

Claims

1. A processing data managing system comprising:

a data processing section for receiving raw data on processing conditions of film forming treatments for magnetic disks collected in a magnetic disk manufacturing apparatus that performs a same process treatment for each of repeated cycles and processing said raw data into a characteristic value for each of the repeated cycles, and

a data storage unit for storing the characteristic value for each of the repeated cycles in a storage,

said data processing section obtaining the characteristic value for each of the repeated cycles by converting the raw data for one cycle into the characteristic value representing characteristics of the raw data for one cycle,

said data storage unit storing the characteristic values for the repeated cycles in the storage so as to visualize time-dependent changes of the characteristic values for the repeated cycles,

the magnetic disk manufacturing apparatus being configured to form magnetic disk thin films on the surface of a substrate by generation of discharge in a processing chamber maintained in a predetermined gas pressure atmosphere;

the raw data being such that the number of data per hour is 14400000 or more where at least the raw data on power supply output for generation of the discharge are collected at regular sampling intervals, one cycle is set to 6 seconds, and sampling is performed 40 times in each second;

the characteristic value being repeatedly calculated for each cycle, based on the raw data on the power supply output, on five items including a discharge ON time and an average value, a maximum value, a minimum value, and a standard deviation of the power supply output so that one cycle is represented by plot data at one point.

4. A processing data managing system according to any of claims 1 to 3, wherein:

said characteristic value for each of the repeated cycles is data reduced in size with respect to the raw data for each of the repeated cycles.

5. A processing system comprising:

a magnetic disk manufacturing apparatus that performs a same process treatment for each of repeated cycles,

a raw data collecting unit for collecting raw data on processing conditions in said processing device, and

a processing data managing system according to any of claims 1 to 3 for managing the raw data collected by said raw data collecting unit.

6. A processing system according to claim 5, wherein:

said magnetic disk manufacturing apparatus is provided with a plurality of electrodes in the processing chamber for discharge generation, and

said raw data collecting unit collects raw data on a power supply output for discharge generation for each of said electrodes.

7. A processing system according to claim 5, wherein:

said magnetic disk manufacturing apparatus comprises a plurality of processing chambers for forming thin films on the substrate in a predetermined order, and

said raw data collecting unit collects raw data on a power supply output for discharge generation for each of said processing chambers.

2. A processing data managing system comprising:

a data processing section for receiving raw data on processing conditions of film forming treatments for magnetic disks collected in a magnetic disk manufacturing apparatus that performs a same process treatment for each of repeated cycles and processing aid raw data into a characteristic value for each of the repeated cycles, and

a display unit for chart-displaying the characteristic value for each of the repeated cycles,

said data processing section obtaining the characteristic value for each cycle by converting the raw data for one cycle into the characteristic value representing characteristics of the raw data for one cycle,

said display unit chart-displaying the characteristic values for the repeated cycles so as to visualize time-dependent changes of the characteristic values for the repeated cycles,

the magnetic disk manufacturing apparatus being configured to form magnetic disk thin films on the surface of a substrate by generation of discharge in a processing chamber maintained in a predetermined gas pressure atmosphere;

the raw data being such that the number of data per hour is 14400000 or more where at least the raw data on power supply output for generation of the discharge are collected at regular sampling intervals, one cycle is set to 6 seconds, and sampling is performed 40 times in each second;

the characteristic value being repeatedly calculated for each cycle, based on the raw data on the power supply output, on five items including a discharge ON time and an average value, a maximum value, a minimum value, and a standard deviation of the power supply output so that one cycle is represented by plot data at one point.

3. A processing data managing system comprising:

a data processing section for receiving raw data on a processing conditions of film forming treatments for magnetic disks collected in a magnetic disk manufacturing apparatus that performs a same process treatment for each of repeated cycles and processing said raw data into a characteristic value for each of the repeated cycles,

a data storage unit for storing the characteristic value for each of the repeated cycles in a storage, and

a display unit for chart-displaying the characteristic value for each of the repeated cycles output from said data processing section or the characteristic value for each of the repeated cycles stored in said storage,

said data processing section obtaining the characteristic value for each of the repeated cycles by converting the raw data for one cycle into the characteristic value representing characteristics of the raw data for one cycle,

said data storage unit storing the characteristic values for the repeated cycles in the storage so as to visualize time-dependent changes of the characteristic values for the repeated cycles,

said display unit chart-displaying the characteristic values for the repeated cycles so as to visualize time-dependent changes of the characteristic values for the repeated cycles,

the magnetic disk manufacturing apparatus being configured to form magnetic disk thin films on the surface of a substrate by generation of discharge in a processing chamber maintained in a predetermined gas pressure atmosphere;

the raw data being such that the number of data per hour is 14400000 or more where at least the raw data on power supply output for generation of the discharge are collected at regular sampling intervals, one cycle is set to 6 seconds, and sampling is performed 40 times in each second;

the characteristic value being repeatedly calculated for each cycle, based on the raw data on the power supply output, on five items including a discharge ON time and an average value, a maximum value, a minimum value, and a standard deviation of the power supply output so that one cycle is represented by plot data at one point.

8. A processing device data managing method comprising:

a step of collecting raw data on process treatment conditions of film forming treatments for magnetic disks in a magnetic disk manufacturing apparatus that performs a same process treatment for each of repeated cycles,

a step of processing said raw data into a characteristic value for each of repeated cycles, and

a step of storing the characteristic value for each of repeated cycles in a storage,

the processing step obtaining the characteristic value for each of repeated cycles by converting the raw data for one cycle into the characteristic value representing characteristics of the raw data for one cycle,

the storing step storing the characteristic values for the repeated cycles in the storage so as to visualize time-dependent changes of the characteristic values for the repeated cycles,

the magnetic disk manufacturing apparatus being configured to form magnetic disk thin films on the surface of a substrate by generation of discharge in a processing chamber maintained in a predetermined gas pressure atmosphere;

the raw data being such that the number of data per hour is 14400000 or more where at least the raw data on power supply output for generation of the discharge are collected at regular sampling intervals, one cycle is set to 6 seconds, and sampling is performed 40 times in each second;

the characteristic value being repeatedly calculated for each cycle, based on the raw data on the power supply output, on five items including a discharge ON time and an average value, a maximum value, a minimum value, and a standard deviation of the power supply output so that one cycle is represented by plot data at one point.

9. A processing device data managing method comprising:

a step of collecting raw data on process treatment conditions in a magnetic disk manufacturing apparatus that performs a same process treatment for each of repeated cycles,

a step of processing said raw data into a characteristic value for each of repeated cycles, and

a step of chart-displaying the characteristic value for each of repeated cycles,

the processing step obtaining the characteristic value for each of repeated cycles by converting the raw data for one of repeated cycles into the characteristic value representing characteristics of the raw data for one cycle,

the chart-displaying step chart-displaying the characteristic value for each of repeated cycles so as to visualize time-dependent changes of the characteristic values for the repeated cycles,

the magnetic disk manufacturing apparatus being configured to form magnetic disk thin films on the surface of a substrate by generation of discharge in a processing chamber maintained in a predetermined gas pressure atmosphere;

the raw data being such that the number of data per hour is 14400000 or more where at least the raw data on power supply output for generation of the discharge are collected at regular sampling intervals, one cycle is set to 6 seconds, and sampling is performed 40 times in each second;

the characteristic value being repeatedly calculated for each cycle, based on the raw data on the power supply output, on five items including a discharge ON time and an average value, a maximum value, a minimum value, and a standard deviation of the power supply output so that one cycle is represented by plot data at one point.