Glass welding method

• US 8,863,553 B2
• Filed: 05/11/2009
• Issued: 10/21/2014
• Est. Priority Date: 05/26/2008
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Matsumoto, Satoshi
• Primary Examiner(s): Daniels, Matthew
• Assistant Examiner(s): HERRING, LISA L
• Application Number:
  US12/994,321
• Publication Number:
  US 20110061789A1
• Time in Patent Office: 1,989 Days
• Field of Search: None
• US Class Current: 65/36
• CPC Class Codes: B23K 26/324 involving non-metallic parts
• CPC Class Codes: C03C 17/04 by fritting glass powder
• CPC Class Codes: C03C 23/0025 by a laser beam
• CPC Class Codes: C03C 27/10 with the aid of adhesive specially adapted for that purpose

Abstract

A glass layer 3 is disposed between a glass member 4 and a thermal conductor 7 along a region to be fused. The glass layer 3 is formed by removing an organic solvent and a binder from the paste layer while using the thermal conductor 7 as a hotplate. Then, a laser beam L1 is emitted while using the thermal conductor 7 as a heatsink, so as to melt the glass layer 3, thereby burning and fixing the glass layer 3 onto the glass member 4. Thereafter, another glass member is overlaid on the glass member 4 having the glass layer 3 burned thereonto, such that the glass layer 3 is interposed therebetween. Then, the region to be fused is irradiated therealong with a laser beam, so as to fuse the glass members together.

Claims

1. A glass fusing method for manufacturing a glass fusing structure by fusing first and second glass members together, the method comprising the steps of:

forming a paste layer on a thermal conductor along a region to be fused, the paste layer containing a glass powder, a laser-absorbing material, an organic solvent and a binder;

removing the organic solvent and the binder from the paste layer by using the thermal conductor as a hotplate, so as to form a glass layer on the thermal conductor;

overlaying the first glass member on the thermal conductor formed with the glass layer while interposing the glass layer therebetween, so as to dispose the glass layer between the first glass member and the thermal conductor;

irradiating the region to be fused therealong with a first laser beam while using the thermal conductor as a heatsink, so as to melt the glass layer disposed between the first glass member and the thermal conductor, and fix the glass layer to the first glass member, the thermal conductor is situated so that it contacts the glass layer during the irradiation process;

removing the thermal conductor from the glass layer; and

overlaying the second glass member on the first glass member having the glass layer fixed thereto such that the glass layer is interposed therebetween, and irradiating the region to be fused therealong with a second laser beam, so as to fuse the first and second glass members together.

2. A glass fusing method according to claim 1, wherein the thermal conductor has a thermal conductivity higher than that of the glass powder.

3. A glass fusing method according to claim 2, wherein the thermal conductor has a thermal conductivity higher than that of the first glass member.

4. A glass fusing method according to claim 1, wherein the difference between coefficients of linear expansion of the glass powder and the thermal conductor is greater than the difference between coefficients of linear expansion of the glass powder and the first glass member.

5. A glass fusing method according to claim 1, wherein the first laser beam irradiates the glass layer from the first glass member side.

6. A glass layer fixing method for fixing a glass layer to a first glass member along a region to be fused in which the first glass member and a second glass member are adapted to be fused together, the method comprising the steps of:

forming a paste layer on a thermal conductor along the region to be fused, the paste layer containing a glass powder, a laser-absorbing material, an organic solvent and a binder;

removing the organic solvent and the binder from the paste layer by using the thermal conductor as a hotplate, so as to form the glass layer on the thermal conductor;

overlaying the first glass member on the thermal conductor formed with the glass layer while interposing the glass layer therebetween, so as to dispose the glass layer between the first glass member and the thermal conductor;

irradiating the region to be fused therealong with a laser beam while using the thermal conductor as a heatsink, so as to melt the glass layer disposed between the first glass member and the thermal conductor, and fix the glass layer to the first glass member, the thermal conductor is situated so that it contacts the glass layer during the irradiation process; and

removing the thermal conductor from the glass layer.

7. A glass layer fixing method according to claim 6, wherein the thermal conductor has a thermal conductivity higher than that of the glass powder.

8. A glass layer fixing method according to claim 7, wherein the thermal conductor has a thermal conductivity higher than that of the first glass member.

9. A glass layer fixing method according to claim 6, wherein the difference between coefficients of linear expansion of the glass powder and the thermal conductor is greater than the difference between coefficients of linear expansion of the glass powder and the first glass member.

10. A glass layer fixing method according to claim 6, wherein the laser beam irradiates the glass layer from the first glass member side.