Sputtering lithium-containing material with multiple targets
First Claim
1. A method of depositing a lithium-containing film on a battery substrate in a sputtering chamber, the method comprising:
- (a) measuring an electrical conductivity at multiple points across a surface of each sputtering target of a plurality of sputtering targets, the sputtering targets comprising (i) a front surface of a sputtering member composed of lithium cobalt oxide or lithium nickel cobalt oxide, and (ii) a back surface, wherein the electrical conductivity measurements are made across the front and back surfaces by two probe or four-point-probe tests, and selecting at least one pair of sputtering targets (i) that each comprise an average electrical conductivity of at least about 5×
10−
6 S·
cm−
1 and (ii) such that the average electrical conductivity of each of the pair of sputtering targets varies from one another by less than about 10%;
(b) providing in the sputtering chamber, the at least one pair of selected sputtering targets and a substrate carrier holding at least one battery substrate;
(c) maintaining a pressure of a sputtering gas in the sputtering chamber; and
(d) energizing the sputtering gas by applying to the pair of sputtering targets, an AC electrical power at a frequency of from about 10 to about 100 kHz.
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Accused Products
Abstract
A method of depositing lithium-containing films on a battery substrate in a sputtering chamber is provided. At least one pair of sputtering targets that each comprise a lithium-containing sputtering member is provided in the sputtering chamber, the sputtering targets selected to each have a conductivity of at least about 5×10−6 S·cm−1. A substrate carrier holding at least one battery substrate is placed in the sputtering chamber. A pressure of sputtering gas is maintained in the sputtering chamber. The sputtering gas is energized by applying to the pair of sputtering targets, an electrical power at a frequency of from about 10 to about 100 kHz.
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Citations
21 Claims
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1. A method of depositing a lithium-containing film on a battery substrate in a sputtering chamber, the method comprising:
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(a) measuring an electrical conductivity at multiple points across a surface of each sputtering target of a plurality of sputtering targets, the sputtering targets comprising (i) a front surface of a sputtering member composed of lithium cobalt oxide or lithium nickel cobalt oxide, and (ii) a back surface, wherein the electrical conductivity measurements are made across the front and back surfaces by two probe or four-point-probe tests, and selecting at least one pair of sputtering targets (i) that each comprise an average electrical conductivity of at least about 5×
10−
6 S·
cm−
1 and (ii) such that the average electrical conductivity of each of the pair of sputtering targets varies from one another by less than about 10%;(b) providing in the sputtering chamber, the at least one pair of selected sputtering targets and a substrate carrier holding at least one battery substrate; (c) maintaining a pressure of a sputtering gas in the sputtering chamber; and (d) energizing the sputtering gas by applying to the pair of sputtering targets, an AC electrical power at a frequency of from about 10 to about 100 kHz. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of depositing a lithium-containing film on a battery substrate in a sputtering chamber, the method comprising:
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(a) measuring an electrical conductivity at multiple points across a surface of each sputtering target of a group of sputtering targets, the sputtering targets comprising (i) a front surface of a sputtering member composed of lithium cobalt oxide or lithium nickel cobalt oxide, and (ii) a back surface, wherein the electrical conductivity measurements are made across the front and back surfaces by two probe or four-point-probe tests, and selecting first and second sputtering targets (i) that each comprise an average electrical conductivity of at least about 5×
10−
6 S·
cm−
1 and (ii) such that the average electrical conductivity of the first and second sputtering targets varies from one another by less than about 10%;(b) providing in the sputtering chamber, (i) the selected first and second sputtering targets connected to a power supply with at least one of the first and second sputtering targets also connected to an impedance matching circuit, and (ii) a substrate carrier holding at least one battery substrate; (c) maintaining a pressure of a sputtering gas in the sputtering chamber; (d) adjusting the impedance of the first or second sputtering target with the impedance matching circuit such that the impedance of the first target is within a range that is ±
10% of the impedance of the second sputtering target; and(e) energizing the sputtering gas by applying to the first and second sputtering targets, an AC electrical power at a frequency of from about 10 to about 100 kHz. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method of depositing a lithium-containing film on a battery substrate in a sputtering chamber, the method comprising:
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(a) measuring an electrical conductivity at multiple points across a surface of each sputtering target of a group of sputtering targets, the sputtering targets comprising (i) a front surface of a sputtering member composed of lithium cobalt oxide or lithium nickel cobalt oxide, and (ii) a back surface, wherein the electrical conductivity measurements are made across the front and back surfaces by two probe or four-point-probe tests, and selecting at least one pair of sputtering targets (i) that each have an average electrical conductivity of at least about 5×
10−
6 S·
cm−
1, and (ii) such that the average electrical conductivity of each of the pair of sputtering targets varies from one another by less than about 10%;(b) providing in the sputtering chamber, the at least one pair of selected sputtering targets and a substrate carrier holding at least one battery substrate; (c) maintaining a pressure of a sputtering gas in the sputtering chamber; and (d) energizing the sputtering gas by applying to the pair of sputtering targets, an electrical power comprising AC power at a frequency of from about 10 to about 100 kHz. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification