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Apparatus for single-molecule detection

  • US 8,865,078 B2
  • Filed: 07/29/2010
  • Issued: 10/21/2014
  • Est. Priority Date: 06/11/2010
  • Status: Active Grant
First Claim
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1. A single molecule detection apparatus, comprising:

  • a) a waveguide comprising;

    a core layer; and

    a first cladding layer made of a dielectric material, whereinat least one nanowell is formed in at least the first cladding layer, andan upper opening of the at least one nanowell is larger than a bottom of the at least one nanowell;

    b) a first opaque protection layer arranged over the first cladding layer without extending into the at least one nanowell;

    c) a second opaque protection layer arranged below the waveguide, the second opaque protection layer having a nanostructured metal pattern; and

    d) at least one light detector.

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