High rate deposition for the formation of high quality optical coatings

• US 8,865,271 B2
• Filed: 05/26/2004
• Issued: 10/21/2014
• Est. Priority Date: 06/06/2003
• Status: Active Grant

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Inventors: Bi, Xiangxin, Lopez, Herman A., Narasimha, Prasad, Euvrard, Eric, Mosso, Ronald J.
• Primary Examiner(s): Turocy, David
• Assistant Examiner(s): Miller, Michael G
• Application Number:
  US10/854,019
• Publication Number:
  US 20050019504A1
• Time in Patent Office: 3,800 Days
• Field of Search: 427/585, 427/586, 427/588, 427/595, 427/596
• US Class Current: 427/569
• CPC Class Codes: B05D 1/12 Applying particulate materials B05D1/06, B05D1/10 take precedence
• CPC Class Codes: B05D 3/06 by exposure to radiation B05D3/02 takes precedence ; plasma treatment B05D3/141
• CPC Class Codes: C03B 19/01 by progressive fusion or sintering of powdered glass onto a shaping substrate, i.e. accretion , e.g. plasma oxidation deposition making fibre preforms C03B37/01291
• CPC Class Codes: C03B 19/1415 Reactant delivery systems
• CPC Class Codes: C03B 2201/10 doped with boron C03B2201/14 takes precedence
• CPC Class Codes: C03B 2201/12 doped with fluorine C03B2201/14 takes precedence
• CPC Class Codes: C03B 2201/28 doped with phosphorus
• CPC Class Codes: C03B 2201/31 doped with germanium
• CPC Class Codes: C03B 2207/34 Liquid, e.g. mist or aerosol
• CPC Class Codes: C03B 37/0128 starting from pulverulent glass
• CPC Class Codes: C03B 37/01294 by delivering pulverulent glass to the deposition target or preform where the powder is progressively melted, e.g. accretion
• CPC Class Codes: C03B 37/01406 Deposition reactors therefor
• CPC Class Codes: C03B 37/01413 Reactant delivery systems C03B37/01807 takes precedence; devices therefor in general B01D1/00, B01J4/00
• CPC Class Codes: C03B 37/0142 Reactant deposition burners
• CPC Class Codes: C23C 16/401 containing silicon
• CPC Class Codes: C23C 16/482 using incoherent light, UV to IR, e.g. lamps
• CPC Class Codes: C23C 16/483 using coherent light, UV to IR, e.g. lasers
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: C23C 24/00 Coating starting from inorganic powder spraying of the coating material in molten state C23C4/00; solid state diffusion C23C8/00 - C23C12/00
• CPC Class Codes: C23C 24/04 Impact or kinetic deposition of particles
• CPC Class Codes: G02B 1/12 : by surface treatment, e.g. by irradiation
• CPC Class Codes: G02B 6/036 : core or cladding comprising multiple layers multicore optical fibres G02B6/02042; microstructured properties G02B6/02295; omniguide fibres G02B6/023
• CPC Class Codes: G02B 6/132 : by deposition of thin films
• CPC Class Codes: Y02P 40/57 : Improving the yield, e-g- reduction of reject rates

Abstract

High rate deposition methods comprise depositing a powder coating from a product flow. The product flow results from a chemical reaction within the flow. Some of the powder coatings consolidate under appropriate conditions into an optical coating. The substrate can have a first optical coating onto which the powder coating is placed. The resulting optical coating following consolidation can have a large index-of-refraction difference with the underlying first optical coating, high thickness and index-of-refraction uniformity across the substrate and high thickness and index-of-refraction uniformity between coatings formed on different substrates under equivalent conditions. In some embodiments, the deposition can result in a powder coating of at least about 100 nm in no more than about 30 minutes with a substrate having a surface area of at least about 25 square centimeters.

Claims

1. A method for forming optical coatings on a plurality of planar substrates in a chamber, the method comprising depositing a powder coating on each of the plurality of planar substrates from a product flow:

wherein the product flow results from a chemical reaction in a reactant flow comprising a first precursor at a first selected vapor pressure and a second precursor at a second selected vapor pressure,

wherein a nozzle that directs a source of the reactant flow along a propagation direction into the chamber is moved within to the chamber to thereby move the reactant flow relative to the substrates and the chemical reaction is driven by a light beam that is moved within the chamber relative to the substrates,

wherein the reactant flow has a cross section perpendicular to the propagation direction characterized by a major axis and a minor axis, the major axis being at least a factor of two greater than the minor axis, and the major axis is sufficiently large that the product flow simultaneously forms a layer on the structures along an entire linear dimension extending across the structures resulting in the deposition of the layer on the structures with one linear pass of the product flow across the structures,

wherein the nozzle is connected to a flexible conduit that provides the reactants, with the flexible conduit moving inside the chamber as needed to provide a continuous supply of the reactants as the nozzle moves,

wherein moving the light beam comprises

passing the light beam into the chamber through a first window, directing the light beam through the reactant flow in a direction parallel to the major axis, and passing the light beam out of the chamber through a second window, with the directing of the beam comprising reflection with a plurality of mirrors, and

moving the beam with the reactant flow to maintain passage of the beam through the reactant flow and parallel to the major axis,

wherein the powder coating comprises the layer and the powder coating is deposited with a thickness of at least about 100 nm in no more than about 30 minutes for each planar substrate, and

wherein the optical coatings on respective planar substrates have a standard deviation between the optical coatings on the planar substrates in average index-of-refraction for each planar substrate of no more than about 0.001 with a one centimeter edge exclusion.

2. The method of claim 1 wherein the plurality of planar substrates comprises at least about 5 planar substrates.

3. The method of claim 1 wherein the optical coatings on respective planar substrates have a standard deviation between the optical coatings on the planar substrates in average index-of-refraction for each planar substrate of no more than about 0.0006.

4. The method of claim 1 wherein the optical coatings on respective planar substrates have a standard deviation between the optical coatings on the planar substrates in average index-of-refraction for each planar substrate between about 0.00005 and about 0.0004.

5. The method of claim 1 wherein the powder coating comprises silica.

6. The method of claim 1 wherein the powder coating is deposited at a rate of at least about 5 grams per hour.

7. The method of claim 1 wherein each planar substrate has a surface area of at least about 25 square centimeters.

8. The method of claim 1 wherein the plurality of mirrors and the nozzle are mounted to a bracket that moves relative to the chamber.

9. The method of claim 1 further comprising a flash evaporator for delivering the first precursor at the first selected vapor pressure and the second precursor at the second selected vapor pressure.

10. A method for forming an optical coating on a planar substrate in a chamber, the method comprising depositing a powder coating on the planar substrate from a product flow:

wherein the product flow results from a chemical reaction in a reactant flow comprising a first precursor,

wherein the chemical reaction is driven by a light beam,

wherein the planar substrate has a surface area of at least about 25 square centimeters,

wherein a nozzle that directs a source of the reactant flow along a propagation direction into the chamber is moved within to the chamber to thereby move the reactant flow relative to the substrate and the chemical reaction is driven by a light beam that is moved within the chamber relative to the substrate,

wherein the reactant flow has a cross section perpendicular to the propagation direction characterized by a major axis and a minor axis, the major axis being at least a factor of two greater than the minor axis, and the major axis is sufficiently large that the product flow simultaneously forms a layer on the substrate along an entire linear dimension extending across the substrate resulting in the deposition of the layer on the substrate with one linear pass of the product flow across the substrate,

wherein the nozzle is connected to a flexible conduit that provides the reactants, with the flexible conduit moving inside the chamber as needed to provide a continuous supply of the reactants as the nozzle moves,

wherein moving the light beam comprises

passing the light beam into the chamber through a first window, directing the light beam through the reactant flow in a direction parallel to the major axis, and passing the light beam out of the chamber through a second window, with the directing of the beam comprising reflection with a plurality of mirrors, and

moving the beam with the reactant flow to maintain passage of the beam through the reactant flow and parallel to the major axis,

wherein the method comprises depositing a powder coating comprising the layer on the planar substrate from a product flow with the powder coating having a thickness of at least about 100 nm in no more than about 30 minutes, and

wherein the powder coating consolidates under appropriate conditions into an optical coating having a standard deviation in index-of-refraction across the planar substrate of less than about 0.001 with a 1 centimeter edge exclusion.

11. The method of claim 10 wherein the optical coating has a standard deviation in index-of-refraction across the planar substrate of no more than about 0.0008.

12. The method of claim 10 wherein the optical coating has a standard deviation in index-of-refraction across the planar substrate between about 0.0001 and about 0.0006.

13. The method of claim 10 wherein the powder coating comprises silica.

14. The method of claim 10 wherein the powder coating is deposited at a rate of at least about 5 grams per hour.

15. The method of claim 10 wherein the plurality of mirrors and the nozzle are mounted to a bracket that moves relative to the chamber.

16. The method of claim 10 further comprising a flash evaporator for delivering the first precursor at a first selected vapor pressure and the second precursor at a second selected vapor pressure.