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Formed article, method for producing same, electronic device member, and electronic device

  • US 8,865,810 B2
  • Filed: 03/24/2010
  • Issued: 10/21/2014
  • Est. Priority Date: 03/26/2009
  • Status: Active Grant
First Claim
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1. An electronic device member comprising a formed article;

  • wherein the formed article comprises an ion-implanted layer obtained by implanting ions of a silicon compound into a polymer layer;

    wherein the polymer layer is a polyorganosiloxane compound-containing layer;

    wherein the ion-implanted layer is obtained by implanting ions of the silicon compound into the polymer layer by plasma ion implantation method; and

    wherein the formed article has a water vapor transmission rate at a temperature of 40°

    C. and a relative humidity of 90% of less than 1g/m2/day.

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