Electromagnetic radiation detector with micro-encapsulation, and device for detecting electromagnetic radiation using such detectors
First Claim
Patent Images
1. An electromagnetic radiation detector intended to operate around a wavelength λ
- p contained within a spectral band of interest that is defined between λ
min and λ
max, comprising a plurality of micro-sites, each of the micro-sites including a membrane that is sensitive to radiation at least in the spectral band of interest and each of the micro-sites being provided in a micro-cavity or micro-capsule defined by a substrate, by an upper wall used as a window that is transparent to said radiation in the spectral band of interest for at least some of said plurality of micro-sites and by side walls attached to the substrate and the upper wall, said membrane being suspended above the substrate by means of at least two support arms that include an electrically conducting layer, each of said support arms comprising an end mechanically attached to the substrate,wherein the ends of said support arms attached to the substrate are anchored in said side walls, andwherein the substrate and the side walls are made of successive layers that are formed directly upon each other by deposition.
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Abstract
This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
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Citations
53 Claims
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1. An electromagnetic radiation detector intended to operate around a wavelength λ
- p contained within a spectral band of interest that is defined between λ
min and λ
max, comprising a plurality of micro-sites, each of the micro-sites including a membrane that is sensitive to radiation at least in the spectral band of interest and each of the micro-sites being provided in a micro-cavity or micro-capsule defined by a substrate, by an upper wall used as a window that is transparent to said radiation in the spectral band of interest for at least some of said plurality of micro-sites and by side walls attached to the substrate and the upper wall, said membrane being suspended above the substrate by means of at least two support arms that include an electrically conducting layer, each of said support arms comprising an end mechanically attached to the substrate,wherein the ends of said support arms attached to the substrate are anchored in said side walls, and wherein the substrate and the side walls are made of successive layers that are formed directly upon each other by deposition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
- p contained within a spectral band of interest that is defined between λ
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8. The electromagnetic radiation detector intended to operate around a wavelength λ
- p contained within a spectral band of interest that is defined between λ
min and λ
max, comprising a plurality of micro-sites, each of the micro-sites including a membrane that is sensitive to radiation at least in the spectral band of interest and each of the micro-sites being provided in a micro-cavity or micro-capsule defined by a substrate, and by an upper wall used as a window that is transparent to said radiation in the spectral band of interest for at least some of said plurality of micro-sites and by side walls attached to the substrate and the upper wall, said membrane being suspended above substrate by means of at least two support arms that include an electrically conducting layer, each of said support arms comprising an end mechanically attached to the substrate,wherein the ends of said support arms attached to the substrate are anchored in said side walls, and wherein the side walls that define said micro-cavities or micro-capsules consist of two intimately joined parts; a first lower part that adheres to the substrate and forms semi-detached bases of the peripheral walls at each detection micro-site and locally comprises electrically conducting vertical connections that ensure electrical continuity with the electrically conducting layer of the support arms; a second part, the base of which is superposed on and physically attached to the top of said first lower part around the periphery of each micro-capsule and supports the upper wall which is substantially parallel to the substrate. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53)
- p contained within a spectral band of interest that is defined between λ
Specification