Illumination system, lithographic apparatus and method of adjusting an illumination mode

• US 8,867,021 B2
• Filed: 03/18/2010
• Issued: 10/21/2014
• Est. Priority Date: 08/25/2009
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: De Vries, Gosse Charles, Buis, Edwin Johan, Van Dam, Marinus Johannes Maria, Van Schoot, Jan Bernard Plechelmus, Boon, Fidelus Adrianus, Kreuwel, Hermanus Johannes Maria
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US13/392,022
• Publication Number:
  US 20120154777A1
• Time in Patent Office: 1,678 Days
• Field of Search: 355/52, 355/53, 355/55, 355 67- 71, 359291-292, 2504921-4922
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
• CPC Class Codes: G03F 7/70116 Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets

Abstract

An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

Claims

1. An illumination system comprising a plurality of moveable reflective elements and associated actuators configured to form an illumination mode, wherein one or more of the actuators is arranged to move between first, second and third positions, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

2. The illumination system of claim 1, wherein the actuator is configured to remain in any of the first, second or third positions without power being supplied to the actuator.

3. The illumination system of claim 1, wherein the first and second positions of the actuator are determined by end stops.

4. The illumination system of claim 1, wherein the third position of the actuator is determined by an intermediate stop.

5. The illumination system of claim 1, wherein the illumination system further comprises a beam dump configured to receive radiation that does not form part of the illumination mode.

6. The illumination system of claim 1, wherein the first, second and third positions of the actuator lie on a route which is a straight line.

7. The illumination system of claim 1, wherein the first, second and third positions of the actuator lie on a route which is not a straight line.

8. The illumination system of claim 1, wherein the actuator comprises:

a pivotally mounted rod upon which the moveable reflective element is mounted;

a magnet provided at one end of the rod; and

first and second magnets provided in a yoke, the first and second magnets and yoke configured to provide a magnetic field that defines stable first, second and third positions of the rod magnet and the rod.

9. The illumination system of claim 8, wherein the actuator further comprises a first coil associated with the first magnet and a second coil associated with the second magnet, wherein the first coil or the second coil is configured to be energized to modify force acting on the rod magnet.

10. The illumination system of claim 8, wherein the third position corresponds to a pole of the yoke.

11. The illumination system of claim 1, wherein the actuator is resiliently biased towards the third position.

12. The illumination system of claim 1, wherein the actuator is configured to modulate between the third position and a fourth position, the fourth position being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

13. A lithographic apparatus comprising:

an illumination system comprising a plurality of moveable reflective elements and associated actuators configured to form an illumination mode, wherein one or more of the actuators is arranged to move between first, second and third positions, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

14. The lithographic apparatus of claim 13, further comprising a controller configured to provide an output signal which moves the actuator to plurality of positions, an image sensor, and a memory configured to record a relationship between the output signal of the controller and an output of the image sensor.

15. A method of adjusting an illumination mode formed by a plurality of moveable reflective elements, the method comprising changing the orientation of one or more moveable reflective elements such that radiation reflected from the one or more moveable reflective elements does not form part of the illumination mode, wherein an actuator moves from a first or second position to a third position, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so moves one of the moveable reflective elements from a first or second orientation to a third orientation, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

16. The method of claim 15, wherein the actuator is configured to remain in the third position without power being supplied to the actuator.

17. The method of claim 15, wherein the reflected radiation which does not form part of the illumination mode is directed towards a beam dump.

18. The method of claim 15, wherein the plurality of moveable reflective elements comprise part of a lithographic apparatus, and the reflected radiation which does not form part of the illumination mode is directed towards a surface which does not reflected the radiation towards a patterning device of the lithographic apparatus.

19. The method of claim 15, wherein the actuator modulates from the third position to a fourth position, and so moves one of the moveable reflective elements from the third orientation to a fourth orientation, the fourth orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.