Illumination system, lithographic apparatus and method of adjusting an illumination mode
First Claim
1. An illumination system comprising a plurality of moveable reflective elements and associated actuators configured to form an illumination mode, wherein one or more of the actuators is arranged to move between first, second and third positions, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
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Accused Products
Abstract
An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
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Citations
19 Claims
- 1. An illumination system comprising a plurality of moveable reflective elements and associated actuators configured to form an illumination mode, wherein one or more of the actuators is arranged to move between first, second and third positions, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
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13. A lithographic apparatus comprising:
an illumination system comprising a plurality of moveable reflective elements and associated actuators configured to form an illumination mode, wherein one or more of the actuators is arranged to move between first, second and third positions, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode. - View Dependent Claims (14)
- 15. A method of adjusting an illumination mode formed by a plurality of moveable reflective elements, the method comprising changing the orientation of one or more moveable reflective elements such that radiation reflected from the one or more moveable reflective elements does not form part of the illumination mode, wherein an actuator moves from a first or second position to a third position, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so moves one of the moveable reflective elements from a first or second orientation to a third orientation, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
Specification