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Illumination system, lithographic apparatus and method of adjusting an illumination mode

  • US 8,867,021 B2
  • Filed: 03/18/2010
  • Issued: 10/21/2014
  • Est. Priority Date: 08/25/2009
  • Status: Active Grant
First Claim
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1. An illumination system comprising a plurality of moveable reflective elements and associated actuators configured to form an illumination mode, wherein one or more of the actuators is arranged to move between first, second and third positions, wherein the third position of the actuator lies on a route travelled by the actuator between the first and second positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

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