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Method and structure of an inertial sensor using tilt conversion

  • US 8,869,616 B1
  • Filed: 06/18/2011
  • Issued: 10/28/2014
  • Est. Priority Date: 06/18/2010
  • Status: Active Grant
First Claim
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1. An inertial sensing device disposed upon a substrate member having a surface region, the device comprising:

  • eight anchor structures, the anchor structures being coupled to at least one portion of the surface region;

    two frame structures, the frame structures spatially disposed overlying at least one portion of the surface region, each of the frame structures being coupled to four of the anchor structure(s);

    four peripheral movable structures, the peripheral movable structures spatially disposed overlying at least one portion of the surface region, each of the peripheral movable structures having two flexible tilting members;

    two central movable structures, the central movable structures having at least one portion coupled to each of the flexible tilting members of two peripheral movable structures;

    eight first flexible members, each of the first flexible members being coupled to one of the anchor structures and at least one portion of the frame structures; and

    eight second flexible members, two of the second flexible members being coupled to at least one portion of the frame structure(s) and each of the peripheral movable structures.

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