(Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound
First Claim
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1. An (amide amino alkane) metal compound represented by the formula (1);
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Abstract
The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):
wherein
- M represents a metal atom;
- R1 represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms;
- R2 and R3 may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R2 and R3 may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound;
- Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); and
- n represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3;
with the proviso that - the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded;
- the metal compounds in which M is Mg (Magnesium) and R1 is methyl group are excluded;
- the metal compounds in which M is Zn (Zinc) and R1 is methyl group are excluded;
- the metal compounds in which M is Bi (Bismuth) and R1 is t-butyl group are excluded; and
- in cases where n is two or greater, two or more ligands may be the same as, or different from each other;
and a method of producing a metal-containing thin film using the metal compound.
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8 Claims
- 1. An (amide amino alkane) metal compound represented by the formula (1);
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