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(Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound

  • US 8,871,304 B2
  • Filed: 11/02/2011
  • Issued: 10/28/2014
  • Est. Priority Date: 11/02/2010
  • Status: Expired due to Fees
First Claim
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1. An (amide amino alkane) metal compound represented by the formula (1);

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