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MEMS particle sorting actuator and method of manufacturing

  • US 8,871,500 B2
  • Filed: 01/23/2012
  • Issued: 10/28/2014
  • Est. Priority Date: 01/21/2011
  • Status: Active Grant
First Claim
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1. A microfabricated particle sorting actuator capable of motion and fabricated on a layer of a substrate, comprising:

  • a plurality of microfabricated fluidic channels formed in a plane of the layer of the substrate; and

    a movable structure formed in and from the layer of the substrate with a motion substantially in the plane, acted on by a magnetic force substantially in the same plane and wherein the movable structure simultaneously opens a first microfabricated fluidic channel which is in the plane and closes a second microfabricated fluidic channel also in the plane wherein the motion is substantially rotary, and the movable structure is attached to the substrate at one or more fixed points, and further comprising one or more flexible springs attached to the one or more fixed points, which return the movable structure to a first position when the force is removed.

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