Methods for coating a substrate with an amphiphilic compound
First Claim
1. A polyvinyl alcohol (PVA)-based surface modifier solution comprising:
- PVA dissolved in water at a concentration between 1 to 500 mM, wherein the PVA has a molecular weight in the range of 5 to 200 kiloDaltons and wherein the PVA is 99% hydrolyzed.
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Abstract
Methods of modifying a patterned semiconductor substrate are presented including: providing a patterned semiconductor substrate surface including a dielectric region and a conductive region; and applying an amphiphilic surface modifier to the dielectric region to modify the dielectric region. In some embodiments, modifying the dielectric region includes modifying a wetting angle of the dielectric region. In some embodiments, modifying the wetting angle includes making a surface of the dielectric region hydrophilic. In some embodiments, methods further include applying an aqueous solution to the patterned semiconductor substrate surface. In some embodiments, the conductive region is selectively enhanced by the aqueous solution. In some embodiments, methods further include providing the dielectric region formed of a low-k dielectric material. In some embodiments, applying the amphiphilic surface modifier modifies an interaction of the low-k dielectric region with a subsequent process.
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Citations
14 Claims
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1. A polyvinyl alcohol (PVA)-based surface modifier solution comprising:
PVA dissolved in water at a concentration between 1 to 500 mM, wherein the PVA has a molecular weight in the range of 5 to 200 kiloDaltons and wherein the PVA is 99% hydrolyzed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
Specification