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Electronic damper circuit for MEMS sensors and resonators

  • US 8,875,578 B2
  • Filed: 10/26/2011
  • Issued: 11/04/2014
  • Est. Priority Date: 10/26/2011
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a microelectromechanical system (MEMS) device comprising a mass suspended from a substrate, the MEMS device being configured to generate an output signal indicative of motion of the mass with respect to the substrate; and

    a feedback module configured to provide a control signal to the MEMS device, the control signal being based on the output signal, the MEMS device being configured to apply a damping force to the mass in response to the control signal, the control signal being proportional to a velocity of the mass.

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