Electronic damper circuit for MEMS sensors and resonators
First Claim
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1. An apparatus comprising:
- a microelectromechanical system (MEMS) device comprising a mass suspended from a substrate, the MEMS device being configured to generate an output signal indicative of motion of the mass with respect to the substrate; and
a feedback module configured to provide a control signal to the MEMS device, the control signal being based on the output signal, the MEMS device being configured to apply a damping force to the mass in response to the control signal, the control signal being proportional to a velocity of the mass.
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Abstract
An apparatus includes a microelectromechanical system (MEMS) device including a mass anchored to a substrate. The MEMS device is configured to generate an output signal indicative of motion of the mass with respect to the substrate. The MEMS device includes a feedback module configured to provide a control signal to the MEMS device. The control signal is based on the output signal. The MEMS device is configured to apply a damping force to the mass in response to the control signal.
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Citations
21 Claims
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1. An apparatus comprising:
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a microelectromechanical system (MEMS) device comprising a mass suspended from a substrate, the MEMS device being configured to generate an output signal indicative of motion of the mass with respect to the substrate; and a feedback module configured to provide a control signal to the MEMS device, the control signal being based on the output signal, the MEMS device being configured to apply a damping force to the mass in response to the control signal, the control signal being proportional to a velocity of the mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 21)
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12. A method comprising:
damping a mass suspended from a substrate of a microelectromechanical system (MEMS) device, the damping being based on sensed motion of the mass with respect to a substrate of the MEMS device, the damping comprising applying a damping force to the mass of the MEMS device proportional to a velocity of the MEMS device. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. An apparatus comprising:
a microelectromechanical system (MEMS) device comprising a mass suspended from a substrate, the MEMS device being configured to sense motion of the mass with respect to a substrate of the MEMS device and configured to apply a damping force to the mass in response to a control signal, the damping force being determined according to a velocity of the mass. - View Dependent Claims (20)
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