Using vacuum ultra-violet (VUV) data in microwave sources

• US 8,877,080 B2
• Filed: 10/18/2011
• Issued: 11/04/2014
• Est. Priority Date: 10/18/2010
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Chen, Lee, Zhao, Jianping
• Primary Examiner(s): Vinh, Lan
• Assistant Examiner(s): Lu, Jiong-Ping
• Application Number:
  US13/275,964
• Publication Number:
  US 20120095586A1
• Time in Patent Office: 1,113 Days
• US Class Current: 216/60
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32926 Software, data control or modelling
• CPC Class Codes: H01J 37/32972 Spectral analysis
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67213 comprising at least one ion or electron beam chamber coating by ion implantation C23C; ion or electron beam tubes H01J37/00
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

The invention provides an apparatus and methods for creating gate structures on a substrate in real-time using Vacuum Ultra-Violet (VUV) data and Electron Energy Distribution Function (EEDf) data and associated (VUV/EEDf)-related procedures in (VUV/EEDf) etch systems. The (VUV/EEDf)-related procedures can include multi-layer-multi-step processing sequences and (VUV/EEDf)-related models that can include Multi-Input/Multi-Output (MIMO) models.

Claims

1. A method for processing a substrate using a Vacuum Ultra-Violet and Electron Energy Distribution Function (VUV and EEDf)-related procedure, the method comprising:

positioning a substrate on a substrate holder in a process chamber configured to perform the VUV and EEDf-related procedure;

creating an initial VUV and EEDf-related pre-processing plasma during a first pre-processing time associated with the VUV and EEDf-related procedure using a microwave source;

determining a first measured Vacuum Ultra-Violet (VUV) radiation value for the initial VUV and EEDf-related pre-processing plasma;

comparing the first measured VUV radiation value to first VUV radiation limits during the first pre-processing time;

performing at least one first corrective action to improve the first measured VUV radiation value when the first measured VUV radiation value exceeds one or more of the first VUV radiation limits during the first pre-processing time; and

creating one or more first VUV and EEDf-related plasmas in the processing chamber during a second pre-processing time associated with the VUV and EEDf-related procedure using the microwave source.

2. The method of claim 1, further comprising:

determining a second measured VUV radiation value for at least one of the first VUV and EEDf-related plasmas during the second pre-processing time;

comparing the second measured VUV radiation value to second VUV radiation limits during the second pre-processing time;

performing at least one second corrective action to improve the second measured VUV radiation value when the second measured VUV radiation value exceeds one or more of the second VUV radiation limits during the second pre-processing time; and

creating one or more new VUV and EEDf-related plasmas in the processing chamber during a new processing time associated with the VUV and EEDf-related procedure using the microwave source.

3. The method of claim 2, further comprising:

determining a new measured VUV radiation value for at least one of the new VUV and EEDf-related plasmas during the new processing time;

comparing the new measured VUV radiation value to new VUV radiation limits during the new processing time;

performing at least one new corrective action to improve the new measured VUV radiation value when the new measured VUV radiation value exceeds one or more of the new VUV radiation limits during the new processing time; and

processing the substrate using one or more of the new VUV and EEDf-related plasmas in the processing chamber during a second new processing time associated with the VUV and EEDf-related procedure.

4. The method of claim 2, wherein the new VUV and EEDf-related plasmas comprise a stabilization plasma, or a process plasma, or any combination thereof.

5. The method of claim 1, wherein the microwave plasma source comprises a radial line slotted antenna (RLSA) plasma source, a surface wave plasma source, or a microwave electron cyclotron resonance (ECR) source, or any combination thereof.

6. The method of claim 1, wherein one or more initial plasma stabilization gases are flowed into a plasma generation space at the top of the process chamber during the first pre-processing time associated with the VUV and EEDf-related procedure.

7. The method of claim 1, wherein the microwave source comprises a resonator plate having a plasma-facing surface, the microwave source being configured to provide an initial pre-processing power through the plasma-facing surface to a plasma generation gas during the first pre-processing time, thereby creating the initial VUV and EEDf-related pre-processing plasma in the plasma generation space proximate to the plasma-facing surface during the first pre-processing time.

8. The method of claim 1, wherein one or more VUV and EEDf sensor subsystems are coupled to the process chamber and are used to determine the first measured VUV radiation value during the first pre-processing time.

9. The method of claim 1, wherein performing at least one first corrective action comprises updating at least one of:

an initial gas mixture component, an initial gas mixture flow rate, an initial gas mixture direction, a number of initial pre- processing gases, an initial pre-processing gas flow rate, an initial pre-processing gas flow direction, a chamber pressure, a chamber temperature, an initial pre-processing power, and a substrate temperature.

10. A method for processing a substrate using a Vacuum Ultra-Violet and Electron Energy Distribution Function (VUV and EEDf)-related procedure, the method comprising:

positioning a substrate on a substrate holder in an upper portion of a process chamber configured to perform the VUV and EEDf-related procedure;

creating an initial VUV and EEDf-related pre-processing plasma during a first pre-processing time associated with the VUV and EEDf-related procedure using a microwave source;

determining a first measured Vacuum Ultra-Violet (VUV) radiation value for the initial VUV and EEDf-related pre-processing plasma;

comparing the first measured VUV radiation value to first VUV radiation limits during the first pre-processing time;

performing at least one first corrective action to improve the first measured VUV radiation value when the first measured VUV radiation value exceeds one or more of the first VUV radiation limits during the first pre-processing time; and

creating one or more new VUV and EEDf-related plasmas in the processing chamber during a new processing time associated with the VUV and EEDf-related procedure using the microwave source.

11. The method of claim 10, further comprising:

determining a new measured VUV radiation value for at least one of the new VUV and EEDf-related plasmas during the new processing time;

comparing the new measured VUV radiation value to new VUV radiation limits during the new processing time;

performing at least one new corrective action to improve the new measured VUV radiation value when the new measured VUV radiation value exceeds one or more of the new VUV radiation limits during the new processing time; and

processing the substrate using one or more of the new VUV and EEDf-related plasmas in the processing chamber during a second new processing time associated with the VUV and EEDf-related procedure.

12. The method of claim 10, wherein the new VUV and EEDf-related plasmas comprise a stabilization plasma, or a process plasma, or any combination thereof.

13. The method of claim 10, wherein the microwave plasma source comprises a radial line slotted antenna (RLSA) plasma source, a surface wave plasma source, or a microwave electron cyclotron resonance (ECR) source, or any combination thereof.

14. The method of claim 10, wherein one or more initial plasma stabilization gases are flowed into a plasma generation space at the top of the process chamber during the first pre-processing time associated with the VUV and EEDf-related procedure.

15. The method of claim 10, wherein the microwave source comprises a resonator plate having a plasma-facing surface, the microwave source being configured to provide an initial pre-processing power through the plasma-facing surface to a plasma generation gas during the first pre-processing time, thereby creating the initial VUV and EEDf-related pre-processing plasma in the plasma generation space proximate to the plasma-facing surface during the first pre-processing time.

16. The method of claim 10, wherein one or more VUV and EEDf sensor subsystems are coupled to the process chamber and are used to determine the first measured VUV radiation value during the first pre-processing time.

17. The method of claim 10, wherein performing at least one first corrective action comprises updating at least one of:

an initial gas mixture component, an initial gas mixture flow rate, an initial gas mixture direction, a number of initial pre-processing gases, an initial pre-processing gas flow rate, an initial pre-processing gas flow direction, a chamber pressure, a chamber temperature, an initial pre-processing power, and a substrate temperature.