Optical inspection method and optical inspection apparatus

• US 8,878,119 B2
• Filed: 07/09/2012
• Issued: 11/04/2014
• Est. Priority Date: 06/30/2006
• Status: Expired due to Fees

• Current Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Matsui, Shigeru
• Primary Examiner(s): Epps, Georgia Y
• Assistant Examiner(s): Wyatt, Kevin
• Application Number:
  US13/544,739
• Publication Number:
  US 20120273660A1
• Time in Patent Office: 848 Days
• Field of Search: 250/214.SW, 250/227.21, 356/5.01, 356/5.02, 356/5.03, 359/27, 372/18, 372/30
• US Class Current: 250/214.SW
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot.

Claims

1. A detection apparatus comprising:

a detection unit which receives pulse light, and outputs a detection signal;

a switching unit which executes switching as a function of a photoelectric conversion signal, and outputs said detection signal; and

a wave generating unit which generates a predetermined signal, wherein;

said switching unit is configured to use said photoelectric conversion signal and said predetermined signal as input for said switching,

said photoelectric conversion signal corresponds to emission of said pulse light, and

said wave generating unit is arranged between said switching unit and a photoelectric conversion unit which outputs said photoelectric conversion signal.

2. The detection apparatus according to claim 1, wherein said predetermined signal is a delay signal.

3. The detection apparatus according to claim 2,

wherein said predetermined signal is a continuous signal.

4. The detection apparatus according to claim 3, wherein said switching unit includes at least one of a gate circuit, and an integral circuit.

5. The detection apparatus according to claim 4, further comprising:

a first amplifier which amplifies said detection signal, and outputs a first amplified signal to said switching unit.

6. The detection apparatus according to claim 5, further comprising:

a second amplifier which amplifies said first amplified signal, and outputs a second amplified signal.

7. The detection apparatus to claim 1, wherein said predetermined signal is a continuous signal.

8. The detection apparatus to claim 1, wherein said switching unit includes at least one of a gate circuit, and an integral circuit.

9. The detection apparatus to claim 1, further comprising:

a first amplifier which amplifies said detection signal, and outputs a first amplified signal to said switching unit.

10. The detection apparatus to claim 9, further comprising:

a second amplifier which amplifies said first amplified signal, and outputs a second amplified signal.

11. A switching apparatus comprising:

a switching unit which executes switching as a function of a photoelectric conversion signal, and outputs a signal; and

a wave generating unit which generates a predetermined signal, wherein;

said switching unit is configured to use said photoelectric conversion signal and said predetermined signal as input for said switching,

said photoelectric conversion signal corresponds to emission of a pulse light, and

said wave generating unit is arranged between said switching unit and a photoelectric conversion unit which outputs said photoelectric conversion signal.

12. The switching apparatus according to claim 11, wherein said predetermined signal is a delay signal.

13. The switching apparatus to claim 11,

wherein said predetermined signal is a continuous signal.

14. The switching apparatus to claim 13, wherein said switching unit includes at least one of a gate circuit, and an integral circuit.

15. The switching apparatus according to claim 14, further comprising:

a first amplifier which amplifiers said detection signal, and outputs a first amplified signal to said switching unit.

16. The switching apparatus according to claim 15, further comprising:

a second amplifier which amplifies said first amplified signal, and outputs a second amplified signal.