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Optical inspection method and optical inspection apparatus

  • US 8,878,119 B2
  • Filed: 07/09/2012
  • Issued: 11/04/2014
  • Est. Priority Date: 06/30/2006
  • Status: Expired due to Fees
First Claim
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1. A detection apparatus comprising:

  • a detection unit which receives pulse light, and outputs a detection signal;

    a switching unit which executes switching as a function of a photoelectric conversion signal, and outputs said detection signal; and

    a wave generating unit which generates a predetermined signal, wherein;

    said switching unit is configured to use said photoelectric conversion signal and said predetermined signal as input for said switching,said photoelectric conversion signal corresponds to emission of said pulse light, andsaid wave generating unit is arranged between said switching unit and a photoelectric conversion unit which outputs said photoelectric conversion signal.

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