Method of depositing organic layers onto a substrate

• US 8,878,162 B2
• Filed: 01/31/2008
• Issued: 11/04/2014
• Est. Priority Date: 01/31/2007
• Status: Expired due to Fees

• Current Assignee: Imperial Innovations Limited (Imperial College London)
• Original Assignee: Imperial Innovations Limited (Imperial College London)
• Inventors: Bradley, Donal, Dagenaar, Patrick, Chen, Lichun
• Primary Examiner(s): HENRY, CALEB E
• Application Number:
  US12/525,264
• Publication Number:
  US 20100219401A1
• Time in Patent Office: 2,469 Days
• Field of Search: 257/40, 257/E51.001, 438/99
• US Class Current: 257/40
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: H10K 30/20 comprising organic-organic junctions, e.g. donor-acceptor junctions
• CPC Class Codes: H10K 30/30 comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
• CPC Class Codes: H10K 30/50 Photovoltaic [PV] devices
• CPC Class Codes: H10K 71/13 using printing techniques, e.g. ink-jet printing or screen printing
• CPC Class Codes: H10K 71/18 using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour
• CPC Class Codes: Y02E 10/549 Organic PV cells

Abstract

A method for depositing one or more organic layers onto a substrate, which includes: transferring the one or more layers from a depositing surface of a stamp to the substrate by bringing the layer coated depositing surface of the stamp into contact with the substrate, and the use of either or both of the steps of: (i) contacting the polymer with a plasticizer; and (ii) heating the substrate and/or stamp, in order to create favorable conditions for conformal contact and uniform layer transfer.

Claims

1. A method for depositing one or more organic layers onto a substrate, comprising:

transferring the one or more organic layers from a depositing surface of a stamp to the substrate by bringing the layer coated depositing surface of the stamp into contact with the substrate; and

the step of contacting the one or more organic layers with a plasticizer, wherein the plasticizer is deposited on the surface of the substrate on which the organic layer is to be transferred prior to transferring the one or more organic layers from a depositing surface of a stamp to the substrate.

2. The method defined in claim 1, wherein the one or more organic layers transferred to the substrate are planar.

3. The method defined in claim 1, wherein the one or more organic layers transferred to the substrate are spatially patterned.

4. The method defined in claim 3, wherein the one or more organic layers are transferred from a planar stamp surface having been patterned thereon prior to transfer to the substrate.

5. The method defined in claim 4, wherein an initially uniformly coated organic layer on a planar stamp surface is patterned via the removal of material by transfer to a secondary stamp patterned with the negative replica of the desired pattern.

6. The method defined in claim 4, wherein an initially uniformly coated organic layer on a planar stamp surface is patterned via the removal of material by micro-and/or nano-fabrication techniques.

7. The method defined in claim 1, wherein the one or more organic layers transferred to the substrate are of thickness 1nm to 1μ

m, more preferably of thickness 4 nm to 150 nm, and most preferably of thickness 10 nm to 100 nm.

8. The method defined in claim 3, wherein the one or more organic layers are transferred from a structured stamp surface.

9. The method defined in claim 8 wherein the stamp surface is structured by molding on the surface of one of a plurality of hard materials, including Si and glass, previously patterned by a micro- and/or nano-fabrication technique including a variety of lithographies with dry or wet etching, and focused laser, electron- or ion-beam direct writing.

10. The method defined in claim 1, wherein the substrate is a solid material which may be selected from the group consisting of a plastic sheet or plate, a glass sheet or plate, and a metal sheet or plate.

11. The method defined in claim 1, wherein either the substrate or the stamp with the organic layer to be transferred is heated to facilitate the transfer of the one or more organic layers to the substrate.

12. The method defined in claim 11, wherein the temperature used to facilitate the transfer of the one or more organic layers from the stamp to the substrate is close to the glass transition temperature of the one or more organic layers.

13. The method defined in claim 11, wherein the temperature used to facilitate the transfer of the one or more organic layers from the stamp to the substrate is below 200°

C. and preferably below 150°

C.

14. The method defined in claim 11, wherein the heating is performed by thermal contact with a resistive heater.

15. The method defined in claim 11, wherein the heating is performed by an optical method.

16. The method defined in claim 11, wherein the heating is carried out over a time period of between 1 and 300 s.

17. The method defined in claim 1, wherein the stamp consists partially or wholly of an elastomeric polymer material.

18. The method defined in claim 17, wherein the elastomeric polymer material is partially or wholly comprised of polydimethylsiloxane or a related siloxane polymer.

19. The method defined in claim 17, wherein the elastomeric polymer material is surface modified, preferably by exposure to liquid, vapor, plasma, or irradiation, prior to coating with the one or more organic layers to be transferred.

20. The method defined in claim 17, wherein the elastomeric polymer material is coated with the one or more organic layers to be transferred by a method selected from the group consisting of spin-coating, blade-coating, and ink-jet, screen, and contact printing.

21. The method defined in claim 1, wherein a plasticizer is used to facilitate the transfer of the one or more organic layers from the stamp to the substrate.

22. The method defined in claim 21, wherein the plasticizer is blended with, or otherwise incorporated into, the one or more organic layers to be transferred.

23. The method defined ion claim 21, wherein the plasticizer consists of a hydrophilic liquid or a substance soluble in water.

24. The method defined ion claim 21, wherein the plasticizer consists of a hydrophobic liquid or a substance soluble in organic solvents.

25. The method defined in claim 1, wherein the plasticizer is deposited by a method selected from the group consisting of spin-coating, blade-coating, and ink-jet, screen, and contact printing.

26. The method defined in claim 1, wherein a plurality of organic layers are deposited via multiple depositions of planar and/or patterned layers from one or more stamps.

27. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers, which expresses, either in the singular or combined form, a semi-conducting nature.

28. The method defined in claim 27, wherein the one or more organic layers consist of material that is soluble in water or hydrophilic solvents.

29. The method defined in claim 27, wherein the one or more organic layers consist of material that is soluble in organic or hydrophobic solvents.

30. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers, which expresses, either in the singular or combined form, a conducting nature.

31. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers, which expresses, either in the singular or combined form, an insulating dielectric nature.

32. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers, which expresses, either in the singular or combined form, a passive optical function such as guiding, routing, diffracting, or otherwise modulating the propagation of light.

33. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers, which expresses, either in the singular or combined form, an active optical function such as emitting, amplifying, switching, mixing, or otherwise modulating the wavelength and/or intensity of light.

34. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers and one or more molecules, which expresses as a mixture a semi-conducting nature, or a conducting nature, or an insulating dielectric nature, and/or a passive or an active optical function.

35. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers and one or more nanoparticles, which expresses as a mixture a semi-conducting nature, or a conducting nature, or an insulating dielectric nature, and/or a passive or an active optical function.

36. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers and one or more colloids, which expresses as a mixture a semi-conducting nature, or a conducting nature, or an insulating dielectric nature, and/or a passive or an active optical function.

37. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers and one or more flakes or other fillers, which expresses as a mixture a semi-conducting nature, or a conducting nature, or an insulating dielectric nature, and/or a passive or an active optical function.

38. The method defined in claim 1, wherein the one or more organic layers to be deposited consist of one or more polymers and two or more selected from the group consisting of molecules, nanoparticles, colloids, flakes, and other fillers, which expresses as a mixture a semi-conducting nature, or a conducting nature, or an insulating dielectric nature, and/or a passive or an active optical function.

39. A device structure that contains at least one organic layer fabricated according to claim 1.

40. The device structure defined in claim 39, in which the device structure is selected from the group consisting of a light emitting diode for lighting or display applications, a photodiode for photodetection or solar energy conversion applications, a transistor for radio frequency identification (RFID) or display driving applications, a laser or optical amplifier or optical switch for data- or tele-communication applications, a light source and detector integrated with a microfluidic channel for sensing applications, and a memory element for data storage applications.

41. An array of device structures that contain at least one organic layer fabricated according to claim 1.

42. The array of device structure defined in claim 41, wherein the array of device structures is selected from the group consisting of an array of light emitting diodes for lighting or display applications, an array of photodiodes for photodetection or solar energy conversion applications, an array of transistors for radio frequency identification (RFID) or display driving applications, an array of lasers or optical amplifiers or optical switches for data- or tele-communication applications, an array of light sources and detectors integrated with an array of microfluidic channels for sensing applications, and an array of memory elements for data storage applications.

43. The method defined in claim 1, wherein transfer of the one or more organic layers enables subsequent fabrication processes to be performed.

44. The method defined in claim 43, in which a transferred patterned organic layer acts as an etch mask.

45. The method defined in claim 1, additionally comprising the step of:

heating the substrate and/or the stamp in order to create favorable conditions for conformal contact and uniform layer transfer.

46. A method for depositing one or more organic layers onto a substrate, comprising:

depositing a plasticizer onto a surface of the substrate;

if the plasticizer deposited on the substrate contains a solvent, heating the substrate sufficiently to remove any solvent without damaging the plasticizer;

depositing the one or more organic layers onto a depositing surface of a stamp;

transferring the one or more organic layers from the depositing surface of the stamp to the surface of the substrate on which the plasticizer was deposited by bringing the depositing surface of the stamp having the one or more organic layers deposited thereupon into contact with the surface of the substrate on which the plasticizer was deposited;

heating the substrate and/or the stamp to create facilitate conformal contact and uniform transfer of the one or more organic layers from the depositing surface of the stamp to the substrate; and

removing the stamp from the substrate leaving the one or more organic layers attached to the substrate.

47. A method for depositing one or more organic layers onto a substrate, comprising:

depositing a plasticizer onto a surface of the substrate;

if the plasticizer deposited on the substrate contains a solvent, heating the substrate sufficiently to remove any solvent without damaging the plasticizer;

preparing a depositing surface of a patterned stamp for deposition of the one or more organic layers thereupon;

depositing the one or more organic layers onto the depositing surface of the stamp;

removing unneeded sections of the one or more organic layers from the depositing surface of the stamp and discarding the same;

transferring the one or more organic layers from the depositing surface of the stamp to the surface of the substrate on which the plasticizer was deposited by bringing the depositing surface of the stamp having the one or more organic layers deposited thereupon into contact with the surface of the substrate on which the plasticizer was deposited;

heating the substrate and/or the stamp to create facilitate conformal contact and uniform transfer of the one or more organic layers from the depositing surface of the stamp to the substrate; and

removing the stamp from the substrate leaving the one or more organic layers attached to the substrate.