Display device and method for manufacturing the same
First Claim
1. A method for manufacturing a semiconductor device, comprising the steps of:
- forming an oxide semiconductor layer over an insulating layer;
forming a source electrode layer and a drain electrode layer over and in contact with a first region of the oxide semiconductor layer;
forming an oxide insulating layer over and in contact with a second region of the oxide semiconductor layer; and
performing a heat treatment on the oxide insulating layer so that oxygen in the oxide insulating layer is supplied to the second region of the oxide semiconductor layer,wherein a conductivity of the first region of the oxide semiconductor layer is higher than a conductivity of the second region of the oxide semiconductor layer.
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Accused Products
Abstract
An object is to provide a display device with excellent display characteristics, where a pixel circuit and a driver circuit provided over one substrate are formed using transistors which have different structures corresponding to characteristics of the respective circuits. The driver circuit portion includes a driver circuit transistor in which a gate electrode layer, a source electrode layer, and a drain electrode layer are formed using a metal film, and a channel layer is formed using an oxide semiconductor. The pixel portion includes a pixel transistor in which a gate electrode layer, a source electrode layer, and a drain electrode layer are formed using an oxide conductor, and a semiconductor layer is formed using an oxide semiconductor. The pixel transistor is formed using a light-transmitting material, and thus, a display device with higher aperture ratio can be manufactured.
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Citations
17 Claims
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1. A method for manufacturing a semiconductor device, comprising the steps of:
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forming an oxide semiconductor layer over an insulating layer; forming a source electrode layer and a drain electrode layer over and in contact with a first region of the oxide semiconductor layer; forming an oxide insulating layer over and in contact with a second region of the oxide semiconductor layer; and performing a heat treatment on the oxide insulating layer so that oxygen in the oxide insulating layer is supplied to the second region of the oxide semiconductor layer, wherein a conductivity of the first region of the oxide semiconductor layer is higher than a conductivity of the second region of the oxide semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for manufacturing a semiconductor device, comprising the steps of:
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forming an oxide semiconductor layer over an insulating layer; performing a first heat treatment on the oxide semiconductor layer; forming a source electrode layer and a drain electrode layer over and in contact with a first region of the oxide semiconductor layer; forming an oxide insulating layer over and in contact with a second region of the oxide semiconductor layer; and performing a second heat treatment on the oxide insulating layer so that oxygen in the oxide insulating layer is supplied to the second region of the oxide semiconductor layer, wherein a conductivity of the first region of the oxide semiconductor layer is higher than a conductivity of the second region of the oxide semiconductor layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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Specification